Abstract The available electron cyclotron resonance plasma sources have been simulated in two-dimensional configuration space (Z, R) and three-dimensional velocity space (Vz, Vr, V$\theta$). Using a hybrid model, we treat ions as particles and electrons as fluid. The simulation is specified for plasma parameters of the available apparatus and is focused on the ion flux distributions. For a set of given operating conditions, the spatial distributions of electron temperature, plasma potential, plasma density, ionization rate and the contours map of distributions of particles in different volume cells in velocity space are obtained; statistics on ions that hit the bottom surface are also reported. The distributions of ion flux vectors on different cross-section planes in the plasma are given, and the phenomena of large radial diffusione of ions across magnetic force lines are also demonstrated. Finally, the influences of microwave power and neutral gas pressure on the distributions of ion flux vectors on ZR-plane, ion flux radial distributions and ion currents to all walls have been studied.
Received: 10 June 1996
Accepted manuscript online:
Fund: Project supported Partly by the National Natural Science Foundation of China.
Cite this article:
SHAO FU-QIU (邵福球), WANG LONG (王龙), WU HAN-MING (吴汉明), YAO XIN-ZI (姚鑫兹) ION FLUX BEHAVIOR IN HIGH DENSITY PLASMAS 1997 Acta Physica Sinica (Overseas Edition) 6 110
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