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Acta Physica Sinica (Overseas Edition), 1995, Vol. 4(8): 601-605    DOI: 10.1088/1004-423X/4/8/005
PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES Prev   Next  

PERFORMANCE OF A COMPACT ECR SOURCE FOR MBE EQUIPMENT

YAO XIN-ZI (姚鑫兹)a, HUANG YUN-HENG (黄运衡)b, JI TIAN-REN (季天仁)c, MENG LIN (蒙林)c, LIU HUA (刘华)c
a Institute of Physics, Academia Sinica, Beijing 100080, China ; b Institute of Semiconductors, Academia Sinica, Beijing 100083, China; c High Energy Electronics Research Institute, University of Electronics Science and Technology of China, Chengdu 610054 , China
Abstract  A compact electron cyclotron resonance plasma source has been developed for molecular beaut epitaxy equipment. Faraday cup and Langmuir probe were used to measure the ion current densities, electron temperatures, ion densities, and plasma potentials. The ion current densities as function of pressure and microwave power have been studied.
Received:  23 January 1995      Accepted manuscript online: 
PACS:  52.50.Dg (Plasma sources)  
  52.70.Ds (Electric and magnetic measurements)  
  52.77.Dq (Plasma-based ion implantation and deposition)  
  52.25.Fi (Transport properties)  

Cite this article: 

YAO XIN-ZI (姚鑫兹), HUANG YUN-HENG (黄运衡), JI TIAN-REN (季天仁), MENG LIN (蒙林), LIU HUA (刘华) PERFORMANCE OF A COMPACT ECR SOURCE FOR MBE EQUIPMENT 1995 Acta Physica Sinica (Overseas Edition) 4 601

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