Abstract Angular distribution of sputtered atoms and the phenomenon of "element local richness relative to microtopographic feature" (ELR-MTF) of the sputtered tar-get surface have been investigated on Cu-37at%Ag alloys by means of Rutherford backscattering spectroscopy technique and a method based on combined scanning electron microscopy and electron probe microanalysis measurements. In this paper, emphasis is put on the bombardment with different doses and angular distributions of sputtered atoms ejecting from various micro-zones on the topographic surface during sputtering. We propose a new model (ELR-MTF model) to interpret the shape of angular distributions and the variation of R-$\theta$ (ejection angle of sputtered atoms) curves. This model can qualitatively explain the experiment quite well.
Received: 16 July 1992
Accepted manuscript online:
PACS:
68.49.Sf
(Ion scattering from surfaces (charge transfer, sputtering, SIMS))
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