Photoreflectance system based on vacuum ultraviolet laser at 177.3 nm

doi:10.1088/1674-1056/ac89e4

Abstract Photoreflectance (PR) spectroscopy is a powerful and non-destructive experimental technique to explore interband transitions of semiconductors. In most PR systems, the photon energy of the pumping beam is usually chosen to be higher than the bandgap energy of the sample. To the best of our knowledge, the highest energy of pumping laser in reported PR systems is 5.08 eV (244 nm), not yet in the vacuum ultraviolet (VUV) region. In this work, we report the design and construction of a PR system pumped by VUV laser of 7.0 eV (177.3 nm). At the same time, dual-modulated technique is applied and a dual channel lock-in-amplifier is integrated into the system for efficient PR measurement. The system's performance is verified by the PR spectroscopy measurement of well-studied semiconductors, which testifies its ability to probe critical-point energies of the electronic band in semiconductors from ultraviolet to near-infrared spectral region.

Keywords: photoreflectance spectroscopy vacuum ultraviolet laser electronic band structure critical points of electron density of states

Received: 30 May 2022
Revised: 29 July 2022
Accepted manuscript online: 16 August 2022

PACS:	07.60.-j	(Optical instruments and equipment)
	78.40.-q	(Absorption and reflection spectra: visible and ultraviolet)
	71.20.-b	(Electron density of states and band structure of crystalline solids)
	78.20.-e	(Optical properties of bulk materials and thin films)

Fund: Project supported by the National Development Project for Major Scientific Research Facility of China (Grant No. ZDYZ2012-2), the National Natural Science Foundation of China (Grant No. 11874350), and CAS Key Research Program of Frontier Sciences (Grant Nos. ZDBS-LY-SLH004 and XDPB22).

Corresponding Authors: Xue-Lu Liu, Ping-Heng Tan
E-mail: liuxuelu@semi.ac.cn;phtan@semi.ac.cn

Cite this article:

Wei-Xia Luo(罗伟霞), Xue-Lu Liu(刘雪璐), Xiang-Dong Luo(罗向东), Feng Yang(杨峰), Shen-Jin Zhang(张申金), Qin-Jun Peng(彭钦军), Zu-Yan Xu(许祖彦), and Ping-Heng Tan(谭平恒) Photoreflectance system based on vacuum ultraviolet laser at 177.3 nm 2022 Chin. Phys. B 31 110701

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Photoreflectance system based on vacuum ultraviolet laser at 177.3 nm

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