Synthesis of flower-like WS2 by chemical vapor deposition

doi:10.1088/1674-1056/ac0524

Abstract Flower-like tungsten disulfide (WS₂) with a diameter of 5-10 μm is prepared by chemical vapor deposition (CVD). Scanning electron microscopy (SEM), energy dispersive spectrometer (EDS), Raman spectroscopy, and ultraviolet-visible (UV-vis) spectroscopy are used to characterize its morphological and optical properties, and its growth mechanism is discussed. The key factors for the formation of flower-like WS₂ are determined. Firstly, the cooling process causes the generation of nucleation dislocations, and then the "leaf" growth of flower-like WS₂ is achieved by increasing the temperature.

Keywords: flower-like WS₂ chemical vapor deposition (CVD) optical property growth mechanism

Received: 09 February 2021
Revised: 10 May 2021
Accepted manuscript online: 26 May 2021

PACS:	62.23.Kn	(Nanosheets)
	81.15.Gh	(Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.))
	68.55.-a	(Thin film structure and morphology)
	78.20.Ci	(Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity))

Fund: Project supported by the Joint Research Funds of Department of Science & Technology of Shaanxi Province and Northwestern Polytechnical University (Grant No. 2020GXLH-Z-029).

Corresponding Authors: Wei Ren, Ai-Ling Feng
E-mail: renwei@xupt.edu.cn;ailing@mail.xjtu.edu.cn

Cite this article:

Jin-Zi Ding(丁金姿), Wei Ren(任卫), Ai-Ling Feng(冯爱玲), Yao Wang(王垚), Hao-Sen Qiao(乔浩森), Yu-Xin Jia(贾煜欣), Shuang-Xiong Ma(马双雄), and Bo-Yu Zhang(张博宇) Synthesis of flower-like WS₂ by chemical vapor deposition 2021 Chin. Phys. B 30 126201

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Synthesis of flower-like WS₂ by chemical vapor deposition