Theoretical analytic model for RESURF AlGaN/GaN HEMTs

doi:10.1088/1674-1056/28/2/027302

Abstract In this paper, we propose a two-dimensional (2D) analytic model for the channel potential and electric field distribution of the RESURF AlGaN/GaN high electron mobility transistors (HEMTs). The model is constructed by two-dimensional Poisson's equation with appropriate boundary conditions. In the RESURF AlGaN/GaN HEMTs, we utilize the RESURF effect generated by doped negative charge in the AlGaN layer and introduce new electric field peaks in the device channels, thus, homogenizing the distribution of electric field in channel and improving the breakdown voltage of the device. In order to reveal the influence of doped negative charge on the electric field distribution, we demonstrate in detail the influences of the charge doping density and doping position on the potential and electric field distribution of the RESURF AlGaN/GaN HEMTs with double low density drain (LDD). The validity of the model is verified by comparing the results obtained from the analytical model with the simulation results from the ISE software. This analysis method gives a physical insight into the mechanism of the AlGaN/GaN HEMTs and provides reference to modeling other AlGaN/GaN HEMTs device.

Keywords: RESURF AlGaN/GaN HEMTs two-dimensional analytic model potential distribution electric field distribution

Received: 26 October 2018
Revised: 03 December 2018
Accepted manuscript online:

PACS:	73.40.Kp	(III-V semiconductor-to-semiconductor contacts, p-n junctions, and heterojunctions)
	85.30.Tv	(Field effect devices)
	85.30.De	(Semiconductor-device characterization, design, and modeling)

Fund: Project supported by the National Basic Research Program of China (Grant No. 2015CB351906), the National Natural Science Foundation of China (Grant No. 61774114), the Key Program of the National Natural Science Foundation of China (Grant No. 61334002), and the 111 Project, China (Grant No. B12026).

Corresponding Authors: Hao Wu, Bao-Xing Duan
E-mail: haowu1701@163.com;bxduan@163.com

Cite this article:

Hao Wu(吴浩), Bao-Xing Duan(段宝兴), Luo-Yun Yang(杨珞云), Yin-Tang Yang(杨银堂) Theoretical analytic model for RESURF AlGaN/GaN HEMTs 2019 Chin. Phys. B 28 027302

[1]	Cai Y, Zhou Y, Chen K J and Lau K M 2005 IEEE Electron. Dev. Lett. 26 435
[2]	Saito W, Takada Y, Kuraguchi M, Tsuda. K, Omura I, Ogura T and Ohashi H 2003 IEEE Trans. Electron. Dev. 50 2528
[3]	Ambacher O, Foutz B, Smart J, Shealy J R, Weimann N G, Chu K, Murphy M, Sierakowski A J, Schaff W J and EastmanFoutz L F 2000 J. Appl. Phys. 87 334
[4]	Ambacher O, Dimitrov R, Stutzmann M, Foutz B E, Murphy M J, Smart J A, Shealy J R, Weimann N G, Chu K, Chumbes M, Green B, Sierakowski A J, Schaff W J and Eastman L F 1999 Phys. Status Solidi 216 381
[5]	Asbeck P M, Yu E T and Lau S S 1997 Electron. Lett. 33 1230
[6]	Ludikhuize A W 2002 12th Int. Symp. Power Semicond. Dev. & Ics. Proc., 22-25 May, 2000, Toulouse, France, p. 11
[7]	Duan B X and Yang Y T 2012 Sci. China: Inform. Sci. 42 770
[8]	Zhao Z, Luo Q and Du J 2013 Electron. Lett. 49 1638
[9]	Mao W, She W B, Yang C, Zhang C, Zhang J C, Ma X H , Zhang J F, Liu H X, Yang L A, Zhang K, Zhao S L, Chen Y H, Zheng X F and Hao Y 2014 Chin. Phys. B 23 087305
[10]	Kumar S P, Agrawal A, Chaujar R, Gupta M and Gupta R S 2008 Superlattices & Microstruct. 44 37
[11]	Duan B X, Yang Y and Zhang B 2010 Solid State Electron. 54 685
[12]	Ahmed T, Khan M T A, Islam M S 2012 International Conference on Devices, Circuits and Systems (ICDCS), March 15-16, Coimbatore, India, p. 226

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Theoretical analytic model for RESURF AlGaN/GaN HEMTs

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