Enhancement of off-state characteristics in junctionless field effect transistor using a field plate

doi:10.1088/1674-1056/27/6/067402

Abstract In this paper, a novel junctionless field effect transistor (JLFET) is proposed. In the presence of a field plate between gate and drain, the gate-induced drain leakage (GIDL) effect is suppressed due to the decrease of lateral band-to-band tunneling probability. Thus, the off-state current I_off, which is mainly provided by the GIDL current, is reduced. Sentaurus simulation shows that the I_off of the new optimized JLFET is reduced by~2 orders and its sub-threshold swing can reach 76.8 mV/decade with little influence on its on-state current I_on, so its I_on/I_off ratio is improved by 2 orders of magnitude compared with that of the normal JLFET. Optimization of device parameters such as Φ_fps (the work difference between field plate and substrate) and L_FP (the length of field plate), is also discussed in detail.

Keywords: lateral band to band tunneling GIDL off-state current field plate

Received: 27 October 2017
Revised: 30 March 2018
Accepted manuscript online:

PACS:	74.55.+v	(Tunneling phenomena: single particle tunneling and STM)
	85.30.Tv	(Field effect devices)
	85.30.De	(Semiconductor-device characterization, design, and modeling)

Fund: Project supported by the National Natural Science Foundation of China (Grant No.61704130),the Fundamental Research Funds for the Central Universities,China (Grant No.20101166085) and the Opening Project of Key Laboratory of Microelectronic Devices&Integrated Technology from Institute of Microelectronics,Chinese Academy of Sciences (Grant No.90109162905).

Corresponding Authors: Bin Wang
E-mail: wbin@xidian.edu.cn

Cite this article:

Bin Wang(王斌), He-Ming Zhang(张鹤鸣), Hui-Yong Hu(胡辉勇), Xiao-Wei Shi(史小卫) Enhancement of off-state characteristics in junctionless field effect transistor using a field plate 2018 Chin. Phys. B 27 067402

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Enhancement of off-state characteristics in junctionless field effect transistor using a field plate

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