Characterization of zirconium thin films deposited by pulsed laser deposition

doi:10.1088/1674-1056/23/9/098103

Abstract Zirconium (Zr) thin films deposited on Si (100) by pulsed laser deposition (PLD) at different pulse repetition rates are investigated. The deposited Zr films exhibit a polycrystalline structure, and the X-ray diffraction (XRD) patterns of the films show the α Zr phase. Due to the morphology variation of the target and the laser-plasma interaction, the deposition rate significantly decreases from 0.0431 Å/pulse at 2 Hz to 0.0189 Å/pulse at 20 Hz. The presence of droplets on the surface of the deposited film, which is one of the main disadvantages of the PLD, is observed at various pulse repetition rates. Statistical results show that the dimension and the density of the droplets increase with an increasing pulse repetition rate. We find that the source of droplets is the liquid layer formed under the target surface. The dense nanoparticles covered on the film surface are observed through atomic force microscopy (AFM). The root mean square (RMS) roughness caused by valleys and islands on the film surface initially increases and then decreases with the increasing pulse repetition rate. The results of our investigation will be useful to optimize the synthesis conditions of the Zr films.

Keywords: laser processing Zr thin film droplet pulse repetition rate

Received: 02 January 2014
Revised: 25 February 2014
Accepted manuscript online:

PACS:	81.15.Fg	(Pulsed laser ablation deposition)
	61.05.-a	(Techniques for structure determination)

Fund: Project supported by the National Natural Science Foundation of China (Grant No. 91126001).

Corresponding Authors: Long Xing-Gui
E-mail: mengdejuli2017@sina.cn

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Liu Wei (刘伟), Wan Jing-Ping (万竟平), Cai Wu-Peng (蔡吴鹏), Liang Jian-Hua (梁建华), Zhou Xiao-Song (周晓松), Long Xing-Gui (龙兴贵) Characterization of zirconium thin films deposited by pulsed laser deposition 2014 Chin. Phys. B 23 098103

[1]	Colasa K B, Mottaa A T, Almerb J D, Daymondc M R, Kerrc M, Banchikd A D, Vizcainod P and Santistebane J R 2010 Acta Mater. 58 6575
[2]	Zütte A 2003 Materials Today 6 24
[3]	Samala M K, Sanyalb G and Chakravartty J K 2011 Eng. Fall Anal. 18 2042
[4]	Wang F and Gong H R 2012 Int. J. hydrogen. Energ. 37 9688
[5]	Rapperport E J 1959 Acta Metall. 7 254
[6]	Kaschner G C and Gray III G T 2000 Metall. Mater. Trans. A 31 1997
[7]	Tenckhoff E 1988 ASTM, Philadelphia, p. 55
[8]	Pilloud D, Pierson J F, Rousselot C and Palmino F 2005 Scripta Materialia 53 1031
[9]	Pichon L, Girardeau T, Lignou F and Straboni A 1999 Thin Solid Films 342 93
[10]	Singh A, Kuppusami P, Thirumurugesan R, Ramaseshan R, Kamruddin M, Dash S, Ganesan V and Mohandas E 2011 Appl. Surf. Sci. 257 9909
[11]	Chakraborty J, Kishor Kumar K, Mukherjee S and Ray S K 2008 Thin Solid Films 516 8479
[12]	Smardz L 2005 J. Alloy Compd. 395 17
[13]	Ohring M 2002 The Materials Science of Thin Films (New York: Academic Press)
[14]	He Y and Che J G 2000 Acta Phys. Sin. 49 1747 (in Chinese)
[15]	De Bonis A, Galasso A, Ibris N, Sansone M, Santagata A and Teghil R 2012 Surf. Coat Tech. 207 279
[16]	Guo Q L and Goodman D W 2001 Chin. Phys. 10 80
[17]	Tan X Y, Liu D and Zhang D M 2006 Chin. Phys. Lett. 23 2277
[18]	Verma S, Tirumala Rao B, Rai S, Ganesan V and Kukreja L M 2012 Appl. Surf. Sci. 258 4898
[19]	Perrone A, Cultrera L, Lorusso A, Maiolo B and Strafella F 2013 J. Appl. Phys. 113 026102
[20]	Ganser D, Gottmann J, Mackens U and Weichmann U 2010 Appl. Surf. Sci. 257 954
[21]	Uccello A, Dellasega D, Perissinotto S, Lecis N and Passoni M 2013 J. Nucl. Mater. 432 261
[22]	Lorusso A, De Giorgi M L, Fotakis C, Maiolo B, Miglietta P, Papadopoulou E L and Perrone A 2012 Appl. Surf. Sci. 258 8719
[23]	Lorusso A, Cultrera L, Fasano V and Perrone A 2011 Nucl. Instrum. Meth. B 269 3091
[24]	Van de Riet E, Nillesen C J C M and Dieleman J 1993 J. Appl. Phys. 74 2008
[25]	Arias J L, Mayor M B, Pou J, Leon B and Erez-Amor M P 2002 Vacuum 67 653
[26]	Guan L, DuanMing Z, Xu L and ZhiHua L 2008 Nucl. Instrum. Meth. B 266 57
[27]	De Bonis A, Galasso A, Ibris N, Sansone M, Santagata A and Teghil R 2012 Surf. Coat Tech. 207 279
[28]	Miglietta P, Fasano V, Papadopoulou E, Liu B, Horacio Rosa D and Perrone A 2012 Physics Procedia 32 335
[29]	Dellasega D, Merlo G, Conti C, Bottani C E and Passoni M 2012 J. Appl. Phys. 112 084328
[30]	Irissou E, Drogoff B L and Chaker M 2004 J. Mater. Res. 19 3
[31]	Amoruso S 1999 Appl. Surf. Sci. 138-139 292
[32]	Cultrera L, Zeifman M I and Perrone A 2006 Phys. Rev. B 73 075304
[33]	Dima A, Perrone A and Klini A 2005 Appl. Surf. Sci. 247 38
[34]	Hiroshima Y, Ishiguro T, Urata I, Makita H, Ohta H, Tohogi M and Ichinose Y 1996 J. Appl. Phys. 79 3572
[35]	Singh R K, Bhattacharya D and Narayan J 1990 Appl. Phys. Lett. 57 2022

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