Preparation and characterization of thick cubic boron nitride films

doi:10.1088/1674-1056/23/6/066805

Abstract Cubic boron nitride (c-BN) films are prepared by the radio frequency magnetron sputtering technique. The stresses and crystallinities of the films are estimated by the Fourier transform infrared spectroscopy of c-BN samples, including the peak shifts and varieties of full widths at half maximum. The effects of the B-C-N interlayer and the two-stage deposition method on the c-BN films are investigated. Then the thick and stable c-BN films are prepared by a combination of the two methods. The properties of the interlayer and film are also characterized.

Keywords: cubic BN films B-C-N interlayer stress hardness

Received: 15 September 2013
Revised: 09 December 2013
Accepted manuscript online:

PACS:	68.55.A-	(Nucleation and growth)
	81.15.Hi	(Molecular, atomic, ion, and chemical beam epitaxy)
	68.35.B-	(Structure of clean surfaces (and surface reconstruction))

Corresponding Authors: Dong Chuang
E-mail: dong@dlut.edu.cn

Cite this article:

Wang Ming-E (王明娥), Ma Guo-Jia (马国佳), Dong Chuang (董闯), Gong Shui-Li (巩水利) Preparation and characterization of thick cubic boron nitride films 2014 Chin. Phys. B 23 066805

[1]	Wilhelm, Kulisch, Regine and Freudenstein 2007 Thin Solid Films 516 216
[2]	Chen H, Liu J K, Deng J X, Chen G H, Tian L, Ding Y and He D Y 2006 Acta Phys. Sin. 55 5441 (in Chinese)
[3]	Lattemann M, Ulrich S and Ye J 2006 Thin Solid Films 515 1058
[4]	Ye J, Ulrich S, Ziebert C and Stüber M 2008 Thin Solid Films 517 1151
[5]	Kim H S, Park J K, Lee W S and Baik Y J 2011 Thin Solid Films 519 7871
[6]	Deng J X, Qin Y, Kong L, Yang X L, Li T, Zhao W P and Yang P 2012 Chin. Phys. B 21 047202
[7]	Park J K, Ko J S and Baik Y J 2013 Surf. Coat. Technol. 215 104
[8]	Yang H S, Nie A M and Zhang J Y 2009 Acta Phys. Sin. 58 1364 (in Chinese)
[9]	Deyneka N, Zhang X W, Boyen H G, Ziemann P and Banhart F 2004 Diamond Relat. Mater. 13 473
[10]	Fan Y M, Zhang X W, You J B, Tan H R and Chen N F 2009 Surf. Coat. Technol. 203 1452
[11]	Ulrich S, Nold E, Sell K, Stüber M, Ye J C and Ziebert C 2006 Surf. Coat. Technol. 200 6465
[12]	Freudenstein R and Kulisch W 2002 Thin Solid Films 420-421 132
[13]	Setsuhar Y, Kumagai M, Suzuki M, Suzuki T and Miyake S 1999 Surf. Coat. Technol. 116-119 100
[14]	Yamamoto Y, Keunecke U M and Bewilogua K 2000 Thin Solid Films 377/378 331
[15]	Liu J K, Chen G H, Chen H, Deng J X, Zhou T and Zhang Y 2007 Acta Phys. Sin. 56 3418 (in Chinese)
[16]	Zhang X W, Yan H, Wang B, Chen G H and Wong S P 2000 Mater. Lett. 43 148
[17]	Ma G J, Liu X L, Zhang H F, Wu H C and Peng L P 2007 Chin. Phys. 16 1105
[18]	Ye J, Oechsner H and Westermeyr S 2001 J. Vac. Sci. Technol. A 19 2294
[19]	Reinke S, Kuhr M, Kulisch and Kassing R 1995 Diamond Relat. Mater. 4 272
[20]	Taylor C A 1996 Ph. D. Thesis, Univesity of Michigan
[21]	Fahy S, Taylor C A and Clarke R 1997 Phys. Rev. B 56 12573
[22]	Litvinov D, Taylor C A and Clarke R 1998 Diamond Relat. Mater. 7 360
[23]	Fahy S 1995 Phys. Rev. B 51 12873
[24]	Ulrich S, Scherer J and Ehrhardt H 1996 Appl. Phys. Lett. 68 909
[25]	Litvinov D and Khizroev S 1999 Appl. Phys. Lett. 74 955
[26]	Tsai P C 2007 Surf. Coat. Technol. 201 5108
[27]	Watanabe M O, Itoh S, Mizushima K and Sasaki T 1996 Appl. Phys. Lett. 68 2962
[28]	Saugnac F, Teyssandier F and Marchnd A 1992 J. Am. Ceram. Soc. 75 161
[29]	Hegemann D, Riedel R and Oehr C 1999 Thin Solid Films 339 154
[30]	Kim D H, Byon E, Lee S, Kim J K and Ruh H 2004 Thin Solid Films 447-448 192
[31]	Zhou Z F, Bello I, Lei M K, Li K Y, Lee C S and Lee S T 2000 Surf. Coat. Technol. 128 334
[32]	Li H K, Lin G Q and Dong C 2008 Acta Phys. Sin. 57 6636 (in Chinese)
[33]	Mirkarimi P B, Medlin D L, McCarty K F, Dibble D C, Clift W M, Knapp J A and Barbour J C 1997 J. Appl. Phys. 82 1617

[1]	Drift characteristics and the multi-field coupling stress mechanism of the pantograph-catenary arc under low air pressure Zhilei Xu(许之磊), Guoqiang Gao(高国强), Pengyu Qian(钱鹏宇), Song Xiao(肖嵩), Wenfu Wei(魏文赋), Zefeng Yang(杨泽锋), Keliang Dong(董克亮), Yaguang Ma(马亚光), and Guangning Wu(吴广宁). Chin. Phys. B, 2023, 32(4): 045202.
[2]	Couple stress and Darcy Forchheimer hybrid nanofluid flow on a vertical plate by means of double diffusion Cattaneo-Christov analysis Hamdi Ayed. Chin. Phys. B, 2023, 32(4): 040205.
[3]	Influence of the lattice parameter of the AlN buffer layer on the stress state of GaN film grown on (111) Si Zhen-Zhuo Zhang(张臻琢), Jing Yang(杨静), De-Gang Zhao(赵德刚), Feng Liang(梁锋), Ping Chen(陈平), and Zong-Shun Liu(刘宗顺). Chin. Phys. B, 2023, 32(2): 028101.
[4]	Effects of adjacent bubble on spatiotemporal evolutions of mechanical stresses surrounding bubbles oscillating in tissues Qing-Qin Zou(邹青钦), Shuang Lei(雷双), Zhang-Yong Li(李章勇), and Dui Qin(秦对). Chin. Phys. B, 2023, 32(1): 014302.
[5]	Degradation and breakdown behaviors of SGTs under repetitive unclamped inductive switching avalanche stress Chenkai Zhu(朱晨凯), Linna Zhao(赵琳娜), Zhuo Yang(杨卓), and Xiaofeng Gu(顾晓峰). Chin. Phys. B, 2022, 31(9): 097303.
[6]	Microstructure and hardening effect of pure tungsten and ZrO₂ strengthened tungsten under carbon ion irradiation at 700℃ Chun-Yang Luo(罗春阳), Bo Cui(崔博), Liu-Jie Xu(徐流杰), Le Zong(宗乐), Chuan Xu(徐川), En-Gang Fu(付恩刚), Xiao-Song Zhou(周晓松), Xing-Gui Long(龙兴贵), Shu-Ming Peng(彭述明), Shi-Zhong Wei(魏世忠), and Hua-Hai Shen(申华海). Chin. Phys. B, 2022, 31(9): 096102.
[7]	Influence of particle size on the breaking of aluminum particle shells Tian-Yi Wang(王天一), Zheng-Qing Zhou(周正青), Jian-Ping Peng(彭剑平),Yu-Kun Gao(高玉坤), and Ying-Hua Zhang(张英华). Chin. Phys. B, 2022, 31(7): 076107.
[8]	Effects of electrical stress on the characteristics and defect behaviors in GaN-based near-ultraviolet light emitting diodes Ying-Zhe Wang(王颖哲), Mao-Sen Wang(王茂森), Ning Hua(化宁), Kai Chen(陈凯), Zhi-Min He(何志敏), Xue-Feng Zheng(郑雪峰), Pei-Xian Li(李培咸), Xiao-Hua Ma(马晓华), Li-Xin Guo(郭立新), and Yue Hao(郝跃). Chin. Phys. B, 2022, 31(6): 068101.
[9]	Structure, phase evolution and properties of Ta films deposited using hybrid high-power pulsed and DC magnetron co-sputtering Min Huang(黄敏), Yan-Song Liu(刘艳松), Zhi-Bing He(何智兵), and Yong Yi(易勇). Chin. Phys. B, 2022, 31(6): 066101.
[10]	Influence of water environment on paint removal and the selection criteria of laser parameters Li-Jun Zhang(张丽君), Kai-Nan Zhou(周凯南), Guo-Ying Feng(冯国英), Jing-Hua Han(韩敬华),Na Xie(谢娜), and Jing Xiao(肖婧). Chin. Phys. B, 2022, 31(6): 064205.
[11]	Mechanism analysis and improved model for stick-slip friction behavior considering stress distribution variation of interface Jingyu Han(韩靖宇), Jiahao Ding(丁甲豪), Hongyu Wu(吴宏宇), and Shaoze Yan(阎绍泽). Chin. Phys. B, 2022, 31(3): 034601.
[12]	Degradation mechanisms for polycrystalline silicon thin-film transistors with a grain boundary in the channel under negative gate bias stress Dongli Zhang(张冬利), Mingxiang Wang(王明湘), and Huaisheng Wang(王槐生). Chin. Phys. B, 2022, 31(12): 128105.
[13]	Fluorine-plasma treated AlGaN/GaN high electronic mobility transistors under off-state overdrive stress Dongyan Zhao(赵东艳), Yubo Wang(王于波), Yanning Chen(陈燕宁), Jin Shao(邵瑾), Zhen Fu(付振), Fang Liu(刘芳), Yanrong Cao(曹艳荣), Faqiang Zhao(赵法强), Mingchen Zhong(钟明琛), Yasong Zhang(张亚松), Maodan Ma(马毛旦), Hanghang Lv(吕航航), Zhiheng Wang(王志恒), Ling Lv(吕玲), Xuefeng Zheng(郑雪峰), and Xiaohua Ma(马晓华). Chin. Phys. B, 2022, 31(11): 117301.
[14]	Dependence of short channel length on negative/positive bias temperature instability (NBTI/PBTI) for 3D FinFET devices Ren-Ren Xu(徐忍忍), Qing-Zhu Zhang(张青竹), Long-Da Zhou(周龙达), Hong Yang(杨红), Tian-Yang Gai(盖天洋), Hua-Xiang Yin(殷华湘), and Wen-Wu Wang(王文武). Chin. Phys. B, 2022, 31(1): 017301.
[15]	Microcrack localization using a collinear Lamb wave frequency-mixing technique in a thin plate Ji-Shuo Wang(王积硕), Cai-Bin Xu(许才彬), You-Xuan Zhao(赵友选), Ning Hu(胡宁), and Ming-Xi Deng(邓明晰). Chin. Phys. B, 2022, 31(1): 014301.

No Suggested Reading articles found!

Viewed

Full text

Abstract

Cited

Metrics
Related Articles

Preparation and characterization of thick cubic boron nitride films

Cite this article:

Online attention