Chin. Phys. B
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Chin. Phys. B  2017, Vol. 26 Issue (7): 075203    DOI: 10.1088/1674-1056/26/7/075203
PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES Current Issue| Next Issue| Archive| Adv Search |
Influence of a centered dielectric tube on inductively coupled plasma source: Chamber structures and plasma characteristics
Zhen-Hua Bi(毕振华)1, Yi Hong(洪义)1, Guang-Jiu Lei(雷光玖)2, Shuai Wang(王帅)3, You-Nian Wang(王友年)4, Dong-Ping Liu(刘东平)1
1 Liaoning Key Laboratory of Optoelectronic Films & Materials, School of Physics and Materials Engineering, Dalian Nationalities University, Dalian 116600, China;
2 Southwestern Institute of Physics, Chengdu 610041, China;
3 Physics Department, School of Science, Northeastern University, Shenyang 110819, China;
4 School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China

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