Transparent ZnO/glass surface acoustic wave based high performance ultraviolet light sensors

doi:10.1088/1674-1056/24/5/057701

Abstract Surface acoustic wave (SAW) resonators are a type of ultraviolet (UV) light sensors with high sensitivity, and they have been extensively studied. Transparent SAW devices are very useful and can be developed into various sensors and microfluidics for sensing/monitoring and lab-on-chip applications. We report the fabrication of high sensitivity SAW UV sensors based on piezoelectric (PE) ZnO thin films deposited on glass substrates. The sensors were fabricated and their performances against the post-deposition annealing condition were investigated. It was found that the UV-light sensitivity is improved by more than one order of magnitude after annealing. The frequency response increases significantly and the response becomes much faster. The optimized devices also show a small temperature coefficient of frequency and excellent repeatability and stability, demonstrating its potential for UV-light sensing application.

Keywords: surface acoustic wave ultraviolet sensor ZnO thermal annealing

Received: 03 November 2014
Revised: 24 December 2014
Accepted manuscript online:

PACS:	77.65.Dq	(Acoustoelectric effects and surface acoustic waves (SAW) in piezoelectrics)
	07.07.Df	(Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing)
	81.40.Ef	(Cold working, work hardening; annealing, post-deformation annealing, quenching, tempering recovery, and crystallization)

Fund: Project supported by the National Natural Science Foundation of China (Grant Nos. 61274037 and 61301046) and the Research Fund for the Doctoral Program of Higher Education of China (Grant Nos. 20120101110031 and 20120101110054).

Corresponding Authors: ang Xiao-Zhi, Luo Ji-Kui
E-mail: xw224@zju.edu.cn;Jackluo@zju.edu.cn

About author: 77.65.Dq; 07.07.Df; 81.40.Ef

Cite this article:

Wang Wen-Bo (王文博), Gu Hang (谷航), He Xing-Li (何兴理), Xuan Wei-Peng (轩伟鹏), Chen Jin-Kai (陈金凯), Wang Xiao-Zhi (汪小知), Luo Ji-Kui (骆季奎) Transparent ZnO/glass surface acoustic wave based high performance ultraviolet light sensors 2015 Chin. Phys. B 24 057701

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Transparent ZnO/glass surface acoustic wave based high performance ultraviolet light sensors

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