A numerical simulation of surface wave excitation in a rectangular planar-type plasma source

doi:10.1088/1674-1056/18/8/058

Abstract

Abstract The principle of surface wave plasma discharge in a rectangular cavity is introduced simply based on surface plasmon polariton theory. The distribution of surface-wave electric field at the interface of the plasma-dielectric slab is investigated by using the three-dimensional finite-difference time-domain method (3D-FDTD) with different slot-antenna structures. And the experimental image of discharge with a novel slot antenna array and the simulation of the electric field with this slot antenna array are both displayed. Combined with the distribution of surface wave excitation and experimental results, the numerical simulation performed by using 3D-FDTD is shown to be a useful tool in the computer-aided antenna design for large area planar-type surface-wave plasma sources.

Keywords: surface wave plasma numerical simulation three-dimensional finite-difference time-domain method surface plasmons polaritons

Received: 20 September 2008
Revised: 14 October 2008
Accepted manuscript online:

PACS:	52.50.Dg	(Plasma sources)
	52.35.-g	(Waves, oscillations, and instabilities in plasmas and intense beams)
	52.40.Fd	(Plasma interactions with antennas; plasma-filled waveguides)
	52.65.-y	(Plasma simulation)
	52.80.-s	(Electric discharges)
	84.40.Ba	(Antennas: theory, components and accessories)

Fund: Project supported by the Foundation for Returned Scholars, the Ministry of Education of China.

Cite this article:

Chen Zhao-Quan(陈兆权), Liu Ming-Hai(刘明海), Lan Chao-Hui(蓝朝晖), Chen Wei(陈伟), Tang Liang(唐亮), Luo Zhi-Qing(罗志清), Yan Bao-Rong(燕保荣), Lü Jian-Hong(吕建红), and Hu Xi-Wei(胡希伟) A numerical simulation of surface wave excitation in a rectangular planar-type plasma source 2009 Chin. Phys. B 18 3484

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A numerical simulation of surface wave excitation in a rectangular planar-type plasma source

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