| ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS |
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High efficiency, small size, and large bandwidth vertical interlayer waveguide coupler |
| Shao-Yang Li(李绍洋)1,3, Liang-Liang Wang(王亮亮)1,†, Dan Wu(吴丹)1,3, Jin You(游金)1,3, Yue Wang(王玥)1, Jia-Shun Zhang(张家顺)1, Xiao-Jie Yin(尹小杰)1, Jun-Ming An(安俊明)1,2,3, and Yuan-Da Wu(吴远大)1,2,3 |
1 State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China;
3 College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China |
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Abstract Since the advent of three-dimensional photonic integrated circuits, the realization of efficient and compact optical interconnection between layers has become an important development direction. A vertical interlayer coupler between two silicon layers is presented in this paper. The coupling principle of the directional coupler is analyzed, and the traditional method of using a pair of vertically overlapping inverse taper structures is improved. For the coupling of two rectangular waveguide layers, a pair of nonlinear tapers with offset along the transmission direction is demonstrated. For the coupling of two ridge waveguide layers, a nonlinear taper in each layer is used to achieve high coupling efficiency. The simulation results show that the coupling efficiency of the two structures can reach more than 90% in a wavelength range from 1500 nm to 1650 nm. Moreover, the crosstalk is reduced to less than -50 dB by using multimode waveguides at intersections. The vertical interlayer coupler with a nonlinear taper is expected to realize the miniaturization and dense integration of photonic integrated chips.
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Received: 21 May 2021
Revised: 18 June 2021
Accepted manuscript online: 23 June 2021
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PACS:
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42.82.-m
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(Integrated optics)
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42.82.Et
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(Waveguides, couplers, and arrays)
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42.79.Gn
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(Optical waveguides and couplers)
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| Fund: Project supported by the National Key Research and Development Program of China (Grant No. 2019YFB2203001), the Strategic Priority Research Program of the Chinese Academy of Sciences (Grant No. XDB43000000), and the National Natural Science Foundation of China (Grant No. 61805232). |
Corresponding Authors:
Liang-Liang Wang
E-mail: wangliangl09@semi.ac.cn
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Cite this article:
Shao-Yang Li(李绍洋), Liang-Liang Wang(王亮亮), Dan Wu(吴丹), Jin You(游金), Yue Wang(王玥), Jia-Shun Zhang(张家顺), Xiao-Jie Yin(尹小杰), Jun-Ming An(安俊明), and Yuan-Da Wu(吴远大) High efficiency, small size, and large bandwidth vertical interlayer waveguide coupler 2022 Chin. Phys. B 31 024203
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