| INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY |
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Direct growth of graphene films without catalyst on flexible glass substrates by PECVD |
| Rui-Xia Miao(苗瑞霞)†, Chen-He Zhao(赵晨鹤), Shao-Qing Wang(王少青)‡, Wei Ren(任卫), Yong-Feng Li(李永锋), Ti-Kang Shu(束体康), and Ben Yang(杨奔) |
| School of Electronic Engineering, Xi'an University of Posts&Telecommunications, Xi'an 710121, China |
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Abstract A hydrogen-plasma-etching-based plasma-enhanced chemical vapor deposition (PECVD) synthesis route without metal catalyst for preparing the graphene films on flexible glass is developed. The quality of the prepared graphene films is evaluated by scanning electron microscopy, x-ray photoelectron spectroscopy, high-resolution transmission electron microscopy, ultraviolet-visible spectroscopy, and electrochemical measurements. In a radio frequency (RF) power range of 50 W-300 W, the graphene growth rate increases with RF power increasing, while the intensity ratio of D- to G-Raman peak (ID/IG) decreases. When the RF power is higher than 300 W, the ID/IG rises again. By optimizing experimental parameters of hydrogen plasma etching and RF power, the properties of as-prepared flexible graphene on glass are modulated to be able to achieve the graphene's transparency, good electrical conductivity, and better macroscopic uniformity. Direct growth of graphene film without any metal catalyst on flexible glass can be a promising candidate for applications in flexible transparent optoelectronics.
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Received: 02 December 2020
Revised: 02 March 2021
Accepted manuscript online: 16 March 2021
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PACS:
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81.05.ue
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(Graphene)
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81.15.Gh
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(Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.))
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| Fund: Project supported by the National Natural Science Foundation of China (Grant No. 51302215), the Joint Research Funds of Department of Science & Technology of Shaanxi Province and Northwestern Polytechnical University, China (Grant No. 2020GXLH-Z-029), and the Natural Science Basic Research Program of Shaanxi Province, China (Grant Nos. 2018JQ6084 and 2019JQ-860). |
Corresponding Authors:
Rui-Xia Miao, Shao-Qing Wang
E-mail: miao9508301@xupt.edu.cn;Wsqing1212@163.com
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Cite this article:
Rui-Xia Miao(苗瑞霞), Chen-He Zhao(赵晨鹤), Shao-Qing Wang(王少青), Wei Ren(任卫), Yong-Feng Li(李永锋), Ti-Kang Shu(束体康), and Ben Yang(杨奔) Direct growth of graphene films without catalyst on flexible glass substrates by PECVD 2021 Chin. Phys. B 30 098101
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