Chin. Phys. B, 2021, Vol. 30(5): 056106    DOI: 10.1088/1674-1056/abe9a7
Special Issue: SPECIAL TOPIC — Ion beam modification of materials and applications
 SPECIAL TOPIC—Ion beam modification of materials and applications Prev   Next

# Optical spectroscopy study of damage evolution in 6H-SiC by H$_{2}^{ + }$ implantation

Yong Wang(王勇)1, Qing Liao(廖庆)2, Ming Liu(刘茗)3, Peng-Fei Zheng(郑鹏飞)3, Xinyu Gao(高新宇)1, Zheng Jia(贾政)1, Shuai Xu(徐帅)2, and Bing-Sheng Li(李炳生)2,4,†
1 China Institute for Radiation Protection, Taiyuan 030006, China;
2 State Key Laboratory for Environment-Friendly Energy Materials, Southwest University of Science and Technology, Mianyang 621010, China;
3 Southwestern Institute of Physics, Chengdu 610041, China;
4 Engineering Research Center of Biomass Materials, Ministry of Education, Southwest University of Science and Technology, Mianyang 621010, China
Abstract  Lattice defects induced by ion implantation into SiC have been widely investigated in the decades by various techniques. One of the non-destructive techniques suitable to study the lattice defects in SiC is the optical characterization. In this work, confocal Raman scattering spectroscopy and photoluminescence spectrum have been used to study the effects of 134-keV H$_{2}^{ + }$ implantation and thermal treatment in the microstructure of 6H-SiC single crystal. The radiation-induced changes in the microstructure were assessed by integrating Raman-scattering peaks intensity and considering the asymmetry of Raman-scattering peaks. The integrated intensities of Raman scattering spectroscopy and photoluminescence spectrum decrease with increasing the fluence. The recovery of the optical intensities depends on the combination of the implantation temperature and the annealing temperature with the thermal treatment from 700 ℃ to 1100 ℃. The different characterizations of Raman scattering spectroscopy and photoluminescence spectrum are compared and discussed in this study.
Keywords:  SiC      H2+ implantation      Raman scattering spectroscopy      photoluminescence spectrum
Received:  22 January 2021      Revised:  21 February 2021      Accepted manuscript online:  25 February 2021
 PACS: 61.80.-x (Physical radiation effects, radiation damage) 61.80.Jh (Ion radiation effects) 78.30.-j (Infrared and Raman spectra) 78.55.-m (Photoluminescence, properties and materials)
Fund: Project supported by the National Natural Science Foundation of China (Grant No. 12075194), the Sichuan Provincial Science and Technology Program, China (Grant No. 2020ZYD055), and the National Key Research and Development Program of China (Grant No. 2017YFE0301306).
Corresponding Authors:  Bing-Sheng Li     E-mail:  libingshengmvp@163.com

Yong Wang(王勇), Qing Liao(廖庆), Ming Liu(刘茗), Peng-Fei Zheng(郑鹏飞), Xinyu Gao(高新宇), Zheng Jia(贾政), Shuai Xu(徐帅), and Bing-Sheng Li(李炳生) Optical spectroscopy study of damage evolution in 6H-SiC by H$_{2}^{ + }$ implantation 2021 Chin. Phys. B 30 056106