Gradient refractive structured NiCr thin film absorber for pyroelectric infrared detectors

doi:10.1088/1674-1056/28/6/067801

Abstract

A gradient refractive structured NiCr film that has a high extinction coefficient at far infrared range (8-μm-24 μm) is presented as an absorber for pyroelectric infrared detectors. The absorber features high absorption efficiency due to the low reflection off the structured surface and high absorption across the film thickness. The refractive index and extinction coefficient are extracted using spectroscopic ellipsometry. It is found that the single NiCr film exhibits an increasing refractive index as the gas atmosphere pressure increases, hence the three-layer gradient NiCr absorber can be fabricated by adjusting the gas atmosphere pressure during sputtering deposition. Essential Macleod software has been used to generate an efficient film structure design and the calculations show similar absorptance trend compared to the experimental measurement result. The results indicate that the gradient refractive structured metal thin film absorber can provide high absorption for applications in thermal sensing.

Keywords: pyroelectric infrared detector spectroscopic ellipsometry deposition thermal sensing

Received: 26 December 2018
Revised: 22 March 2019
Accepted manuscript online:

PACS:	78.40.Kc	(Metals, semimetals, and alloys)
	81.15.Cd	(Deposition by sputtering)
	81.05.Ea	(III-V semiconductors)

Fund:

Project supported by the National Natural Science Foundation of China (Grant Nos. 61875031 and 61421002).

Corresponding Authors: He Yu
E-mail: yuhe@uestc.edu.cn

Cite this article:

Yunlu Lian(练芸路), He Yu(于贺), Zhiqing Liang(梁志清), Xiang Dong(董翔) Gradient refractive structured NiCr thin film absorber for pyroelectric infrared detectors 2019 Chin. Phys. B 28 067801

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Gradient refractive structured NiCr thin film absorber for pyroelectric infrared detectors

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