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Chin. Phys. B, 2018, Vol. 27(9): 094212    DOI: 10.1088/1674-1056/27/9/094212
Special Issue: TOPICAL REVIEW — Nanophotonics
TOPICAL REVIEW—Nanophotonics Prev   Next  

Etching-assisted femtosecond laser microfabrication

Monan Liu(刘墨南)1, Mu-Tian Li(李木天)2, Han Yang(杨罕)2, Hong-Bo Sun(孙洪波)2
1 Department of Condensed Matter, College of Physics, Jilin University, Changchun 130012, China;
2 State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
Abstract  

Although femtosecond laser microfabrication is one of the most promising three-dimensional (3D) fabrication techniques, it could suffer from low fabrication efficiency for structures with high 3D complexities. By using etching as a main assistant technique, the processing can be speeded up and an improved structure surface quality can be provided. However, the assistance of a single technique cannot satisfy the increasing demands of fabrication and integration of highly functional 3D microstructures. Therefore, a multi-technique-based 3D microfabrication method is required. In this paper, we briefly review the recent development on etching-assisted femtosecond laser microfabrication (EAFLM). Various processing approaches have been proposed to further strengthen the flexibilities of the EAFLM. With the use of the multi-technique-based microfabrication method, 3D microstructure arrays can be rapidly defined on planar or curved surfaces with high structure qualities.

Keywords:  femtosecond laser      microfabrication      microlens array      etching  
Received:  13 April 2018      Revised:  23 May 2018      Published:  05 September 2018
PACS:  42.65.Re (Ultrafast processes; optical pulse generation and pulse compression)  
  42.30.-d (Imaging and optical processing)  
Fund: 

Project supported by the National Natural Science Foundation of China (Grant No. 51501070).

Corresponding Authors:  Han Yang     E-mail:  yanghan@jlu.edu.cn

Cite this article: 

Monan Liu(刘墨南), Mu-Tian Li(李木天), Han Yang(杨罕), Hong-Bo Sun(孙洪波) Etching-assisted femtosecond laser microfabrication 2018 Chin. Phys. B 27 094212

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