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Chin. Phys. B, 2016, Vol. 25(6): 068103    DOI: 10.1088/1674-1056/25/6/068103

Electronic transport properties of silicon junctionless nanowire transistors fabricated by femtosecond laser direct writing

Liu-Hong Ma(马刘红), Wei-Hua Han(韩伟华), Hao Wang(王昊), Qi-feng Lyu(吕奇峰), Wang Zhang(张望), Xiang Yang(杨香), Fu-Hua Yang(杨富华)
Engineering Research Center for Semiconductor Integration Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

Silicon junctionless nanowire transistor (JNT) is fabricated by femtosecond laser direct writing on a heavily n-doped SOI substrate. The performances of the transistor, i.e., current drive, threshold voltage, subthreshold swing (SS), and electron mobility are evaluated. The device shows good gate control ability and low-temperature instability in a temperature range from 10 K to 300 K. The drain currents increasing by steps with the gate voltage are clearly observed from 10 K to 50 K, which is attributed to the electron transport through one-dimensional (1D) subbands formed in the nanowire. Besides, the device exhibits a better low-field electron mobility of 290 cm2·V-1·s-1, implying that the silicon nanowires fabricated by femtosecond laser have good electrical properties. This approach provides a potential application for nanoscale device patterning.

Keywords:  junctionless nanowire transistor      femtosecond laser lithography      electron mobility      quantum transport  
Received:  21 January 2016      Revised:  08 March 2016      Published:  05 June 2016
PACS:  81.07.Gf (Nanowires)  
  73.63.-b (Electronic transport in nanoscale materials and structures)  
  73.40.-c (Electronic transport in interface structures)  
  85.30.Tv (Field effect devices)  

Project supported by the National Natural Science Foundation of China (Grant Nos. 61376096, 61327813, and 61404126) and the National Basic Research Program of China (Grant No. 2010CB934104).

Corresponding Authors:  Wei-Hua Han, Fu-Hua Yang     E-mail:;

Cite this article: 

Liu-Hong Ma(马刘红), Wei-Hua Han(韩伟华), Hao Wang(王昊), Qi-feng Lyu(吕奇峰), Wang Zhang(张望), Xiang Yang(杨香), Fu-Hua Yang(杨富华) Electronic transport properties of silicon junctionless nanowire transistors fabricated by femtosecond laser direct writing 2016 Chin. Phys. B 25 068103

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