Please wait a minute...
Chin. Phys. B, 2016, Vol. 25(4): 048104    DOI: 10.1088/1674-1056/25/4/048104

Subsurface defect characterization and laser-induced damage performance of fused silica optics polished with colloidal silica and ceria

Xiang He(何祥), Gang Wang(王刚), Heng Zhao(赵恒), Ping Ma(马平)
Chengdu Fine Optical Engineering Research Center, Chengdu 610041, China

This paper mainly focuses on the influence of colloidal silica polishing on the damage performance of fused silica optics. In this paper, nanometer sized colloidal silica and micron sized ceria are used to polish fused silica optics. The colloidal silica polished samples and ceria polished samples exhibit that the root-mean-squared (RMS) average surface roughness values are 0.7 nm and 1.0 nm, respectively. The subsurface defects and damage performance of the polished optics are analyzed and discussed. It is revealed that colloidal silica polishing will introduce much fewer absorptive contaminant elements and subsurface damages especially no trailing indentation fracture. The 355-nm laser damage test reveals that each of the fused silica samples polished with colloidal silica has a much higher damage threshold and lower damage density than ceria polished samples. Colloidal silica polishing is potential in manufacturing high power laser optics.

Keywords:  polishing      laser-induced damage      fused silica      colloidal silica     
Received:  07 August 2015      Published:  05 April 2016
PACS:  81.15.Fg (Pulsed laser ablation deposition)  
  61.80.Ba (Ultraviolet, visible, and infrared radiation effects (including laser radiation))  
  81.65.Ps (Polishing, grinding, surface finishing)  
  42.70.Ce (Glasses, quartz)  
Corresponding Authors:  Ping Ma     E-mail:

Cite this article: 

Xiang He(何祥), Gang Wang(王刚), Heng Zhao(赵恒), Ping Ma(马平) Subsurface defect characterization and laser-induced damage performance of fused silica optics polished with colloidal silica and ceria 2016 Chin. Phys. B 25 048104

[1] Stuart B C, Feit M D, Rubenchik A M, Shore B W and Perry M D 1995 Phys. Rev. Lett. 74 2248
[2] Suratwala T, Wong L, Miller P, Feit M D, Menapace J, Steele R, Davis P, and Walmer D 2006 J. Non-Cryst. Solids 352 5601
[3] Han W, Wang F, Zhou L D, Feng B, Jia H T, Li K Y, Xiang Y and Zheng W G 2012 Chin. Phys. B 21 077901
[4] Lee S H, Lu Z Y, Babu S V and Matijevic E 2002 J. Mater. Res. 17 2744
[5] Wang L Y, Zhang K L, Song Z T and Feng S L 2007 Appl. Surf. Sci. 253 4951
[6] Miller P E, Suratwala T I, Bude J D, Laurence T A, Shen N, Steele W A, Feit M D, Menapace J A and Wong L L 2009 Proc. SPIE 7504 75040X
[7] Neauport J, Lamaignere L, Bercegol H, Pilon F and Birolleau J C 2005 Opt. Express 13 10163
[8] Bercegol H, Grua P, Hebert D and Morreeuw J P 2007 Proc. SPIE 6720 672003
[9] Zhang C L, Yuan X D, Xiang X, Wang Z G, Liu C M, Li L, He S B and Zu X T 2012 Chin. Phys. B 21 094213
[10] Genin F Y, Sheehan L, Yoshiyama J, Dijon J and Garrec P 1998 Proc. SPIE 3244 155
[11] Camp D W, Kozlowski M R, Sheehan L M, Nichols M, Dovik M, Raether R, and Thomas I 1998 Proc. SPIE 3244 356
[12] Kozlowski M R, Carr J, Hutcheon I, Torres R, Sheehan L, Camp D and Yan M 1998 Proc. SPIE 3244 365
[13] Alley T, Allard P, Schuster R, Collier D, Smith A V, Do B T and Kilgo A C 2010 Proc. SPIE 7842 784226
[14] Tesar A A, Fuchs B A and Hed P P 1992 Appl. Opt. 31 7164
[15] Smith A, Do B, Schuster R and Collier D 2008 Proc. SPIE 6873 68730U
[16] Preza C, Snyder D L and Conchello J A 1999 J. Opt. Soc. Am. A-Opt. Image Sci. Vis. 16 2185
[17] Mahajan U, Bielmann M and Singh R K 2000 Chemical-Mechanical Polishing -Fundamentals and Challenges (Warrendale: Materials Research Society) p. 27
[18] Choi W and Singh R K 2005 Jpn. J. Appl. Phys. Part 1 44 8383
[19] Choi W S, Abiade J, Lee S M and Singh R K 2004 J. Electrochem. Soc. 151 G512
[20] Liu H J, Huang J, Wang F R, Zhou X D, Ye X, Zhou X Y, Sun L X, Jiang X D, Sui Z and Zheng W G 2013 Opt. Express 21 12204
[21] Miller P E, Bude J D, Suratwala T I, Shen N, Laurence T A, Steele W A, Menapace J, Feit M D and Wong L L 2010 Opt. Lett. 35 2702
[22] Bercegol H, Courchinoux R, Josse M and Rullier J L 2005 Proc. SPIE 5647 78
[23] Hu G H, Zhao Y A, Liu X F, Li D W, Xiao Q L, Yi K and Shao J D 2013 Opt. Lett. 38 2632
[1] Optical modulation of repaired damage site on fused silica produced by CO2 laser rapid ablation mitigation
Chao Tan(谭超), Lin-Jie Zhao(赵林杰), Ming-Jun Chen(陈明君), Jian Cheng(程健), Zhao-Yang Yin(尹朝阳), Qi Liu(刘启), Hao Yang(杨浩), Wei Liao(廖威). Chin. Phys. B, 2020, 29(5): 054209.
[2] Time-dependent photothermal characterization on damage of fused silica induced by pulsed 355-nm laser with high repetition rate
Chun-Yan Yan(闫春燕), Bao-An Liu(刘宝安), Xiang-Cao Li(李香草), Chang Liu(刘畅), Xin Ju(巨新). Chin. Phys. B, 2020, 29(2): 027901.
[3] Damage characteristics of laser plasma shock wave on rear surface of fused silica glass
Xiong Shen(沈雄), Guo-Ying Feng(冯国英), Sheng Jing(景晟), Jing-Hua Han(韩敬华), Ya-Guo Li(李亚国), Kai Liu(刘锴). Chin. Phys. B, 2019, 28(8): 085202.
[4] Laser-induced damage threshold in HfO2/SiO2 multilayer films irradiated by β-ray
Mei-Hua Fang(方美华), Peng-Yu Tian(田鹏宇), Mao-Dong Zhu(朱茂东), Hong-Ji Qi(齐红基), Tao Fei(费涛), Jin-Peng Lv(吕金鹏), Hui-Ping Liu(刘会平). Chin. Phys. B, 2019, 28(2): 024215.
[5] Experimental demonstration of narrow-band rugate minus filters using rapidly alternating deposition technology
Ying Zhang(章瑛), Yan-Zhi Wang(王胭脂), Jiao-Ling Zhao(赵娇玲), Jian-Da Shao(邵建达), Shuang-Chen Ruan(阮双琛). Chin. Phys. B, 2018, 27(5): 054217.
[6] Intense supercontinuum generation in the near-ultraviolet range from a 400-nm femtosecond laser filament array in fused silica
Dongwei Li(李东伟), Lanzhi Zhang(张兰芝), Saba Zafar, He Song(宋鹤), Zuoqiang Hao(郝作强), Tingting Xi(奚婷婷), Xun Gao(高勋), Jingquan Lin(林景全). Chin. Phys. B, 2017, 26(7): 074213.
[7] Improvement of laser damage thresholds of fused silica by ultrasonic-assisted hydrofluoric acid etching
Yuan Li(李源), Hongwei Yan(严鸿维), Ke Yang(杨科), Caizhen Yao(姚彩珍), Zhiqiang Wang(王志强), Chunyan Yan(闫春燕), Xinshu Zou(邹鑫书), Xiaodong Yuan(袁晓东), Liming Yang(杨李茗), Xin Ju(巨新). Chin. Phys. B, 2017, 26(11): 118104.
[8] Damage threshold influenced by polishing imperfection distribution under 355-nm laser irradiation
Zhen Yu(余振), Hong-Ji Qi(齐红基), Wei-Li Zhang(张伟丽), Hu Wang(王虎), Bin Wang(王斌), Yue-Liang Wang(王岳亮), Hao-Peng Huang(黄昊鹏). Chin. Phys. B, 2017, 26(10): 104210.
[9] Stable structure and optical properties of fused silica with NBOHC-E' defect
Peng-Fei Lu(芦鹏飞), Li-Yuan Wu(伍力源), Yang Yang(杨阳), Wei-Zheng Wang(王唯正), Chun-Fang Zhang(张春芳), Chuang-Hua Yang(杨创华), Rui Su(苏锐), Jun Chen(陈军). Chin. Phys. B, 2016, 25(8): 086801.
[10] Correlation of polishing-induced shallow subsurface damages with laser-induced gray haze damages in fused silica optics
Xiang He(何祥), Heng Zhao(赵恒), Gang Wang(王刚), Peifan Zhou(周佩璠), Ping Ma(马平). Chin. Phys. B, 2016, 25(8): 088105.
[11] A nano-scale mirror-like surface of Ti-6Al-4V attained by chemical mechanical polishing
Chenliang Liang(梁晨亮), Weili Liu(刘卫丽), Shasha Li(李沙沙), Hui Kong(孔慧), Zefang Zhang(张泽芳), Zhitang Song(宋志棠). Chin. Phys. B, 2016, 25(5): 058301.
[12] Polydisperse spherical colloidal silica particles: Preparation and application
Hui Kong(孔慧), Junchao Huo(霍军朝), Chenliang Liang(梁晨亮), Shasha Li(李沙沙), Weili Liu(刘卫丽), Zhitang Song(宋志棠). Chin. Phys. B, 2016, 25(11): 118202.
[13] Influence of secondary treatment with CO2 laser irradiation for mitigation site on fused silica surface
Yong Jiang(蒋勇), Qiang Zhou(周强), Rong Qiu(邱荣), Xiang Gao(高翔), Hui-Li Wang(王慧丽), Cai-Zhen Yao(姚彩珍), Jun-Bo Wang(王俊波), Xin Zhao(赵鑫), Chun-Ming Liu(刘春明), Xia Xiang(向霞), Xiao-Tao Zu(祖小涛), Xiao-Dong Yuan(袁晓东), Xin-Xiang Miao(苗心向). Chin. Phys. B, 2016, 25(10): 108104.
[14] Numerical simulation of modulation to incident laser by submicron to micron surface contaminants on fused silica
Liang Yang(杨亮), Xia Xiang(向霞), Xin-Xiang Miao(苗心向), Li Li(李莉), Xiao-Dong Yuan(袁晓东), Zhong-Hua Yan(晏中华), Guo-Rui Zhou(周国瑞), Hai-Bing Lv(吕海兵), Wan-Guo Zheng(郑万国), Xiao-Tao Zu(祖小涛). Chin. Phys. B, 2016, 25(1): 014210.
[15] ATR-FTIR spectroscopic studies on density changes of fused silica induced by localized CO2 laser treatment
Zhang Chuan-Chao, Zhang Li-Juan, Liao Wei, Yan Zhong-Hua, Chen Jing, Jiang Yi-Lan, Wang Hai-Jun, Luan Xiao-Yu, Ye Ya-Yun, Zheng Wan-Guo, Yuan Xiao-Dong. Chin. Phys. B, 2015, 24(2): 024220.
No Suggested Reading articles found!