Determinations of plasma density and decay time in the hollow cathode discharge by microwave transmission

doi:10.1088/1674-1056/22/12/125202

Abstract The microwave (MW) transmission method is employed to measure both the plasma density and the plasma decay time in the hollow cathode discharge (HCD) in argon at low pressure. The plasma density in DC-driven or pulsed HCD is on the order of 10¹² cm^-3, which can block the X-band MW effectively. In the case of pulsed HCD, the MW transmittance shows the same waveform as the pulsed current during the rising edge if the driving frequency is low, but with a longer delay during the falling edge. The MW transmittance reaches a constant low level when the driving frequency is high enough. The plasma decay time in the HCD system is measured to be about 100 μs around a pressure of 120 Pa. The ambipolar diffusion is considered to be the major mechanism in the decay process.

Keywords: hollow cathode discharge plasma density plasma decay microwave transmission

Received: 26 February 2013
Revised: 25 April 2013
Accepted manuscript online:

PACS:	52.80.Hc	(Glow; corona)
	52.70.-m	(Plasma diagnostic techniques and instrumentation)

Fund: Project supported by the National Natural Science Foundation of China (Grant No. 11005009).

Corresponding Authors: Ouyang Ji-Ting
E-mail: jtouyang@bit.edu.cn

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Zhang Lin (张林), He Feng (何锋), Li Shi-Chao (李世超), Ouyang Ji-Ting (欧阳吉庭) Determinations of plasma density and decay time in the hollow cathode discharge by microwave transmission 2013 Chin. Phys. B 22 125202

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Determinations of plasma density and decay time in the hollow cathode discharge by microwave transmission

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