| ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS |
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The effects of heat treatment on microfluidic devices fabricated in silica glass by femtosecond lasers |
| Li Yan(李岩) and Qu Shi-Liang(曲士良)† |
| Department of Optoelectronics Science, Harbin Institute of Technology at Weihai, Weihai 264209, China |
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Abstract We fabricated complex microfluidic devices in silica glass by water-assisted femtosecond laser ablation and subsequent heat treatment. The experimental results show that after heat treatment, the diameter of the microchannels is significantly reduced and the internal surface roughness is improved. The diameters of the fabricated microchannels can be modulated by changing the annealing temperature and the annealing time. During annealing, the temperature affects the diameter and shape of the protrusions in microfluidic devices very strongly, and these changes are mainly caused by uniform expansion and the action of surface tension.
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Received: 29 July 2011
Revised: 06 September 2011
Accepted manuscript online:
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PACS:
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42.62.-b
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(Laser applications)
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47.85.Np
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(Fluidics)
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52.38.Mf
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(Laser ablation)
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| Fund: Project supported by the Science and Technology Foundation of Heilongjiang Province, China (Grant No. A200912) and the Program of Excellence Team in the Harbin Institute of Technology, China. |
Corresponding Authors:
Qu Shi-Liang,slqu1@yahoo.com.cn
E-mail: slqu1@yahoo.com.cn
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Cite this article:
Li Yan(李岩) and Qu Shi-Liang(曲士良) The effects of heat treatment on microfluidic devices fabricated in silica glass by femtosecond lasers 2012 Chin. Phys. B 21 034208
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