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Chin. Phys., 2001, Vol. 10(13): 45-49    DOI: 10.1088/1009-1963/10/13/009
CROSS DISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY Prev   Next  

SCANNING AUGER ELECTRON SPECTROSCOPIC INVESTIGATIONS OF MAGNETOSTRICTIVE NANOSCALE MULTILAYERS

Alfred Ludwiga, Eberhard Noldb, Christel Adelhelmb, Shen Dian-hongc
a Center of Advanced European Studies and Research, Friedensplatz 16, D-53111 Bonn, FRG; b Forschungszentrum Karlsruhe GmbH,Institut für Materialforschung, 1, Postfach, 3640, D-76021 Karlsruhe, FRG; c Institute of Physics, Chinese Academy of Sciences, Beiing 100080, China
Abstract  The characterisation of thin magnetostrictive multilayers in the nanometerscale range [(4,5nmTb40Fe60/9nmFe)×100] demands a surface sensitive analytical technique. A suitable technique is scanning Auger Electron Spectroscopy (AES) to determine the elemental composition, the thickness, the presence of interdiffusion between thin layers, or the presence of contamination at interfaces.Auger sputter depth profiles are obtained by using Xe-Ion bombardment to etch the sample.Sample rotation during sputtering produces shallow craters, minimises roughening and enhances depth resolution. In addition, Auger maps of the craters are used to reveal the separated magnetostrictive Tb40Fe60 layers and soft magnetic Fe layers.
Keywords:  sputter depth profiles      magnetostrictive multilayer films      Auger electron spectroscopy  
Received:  05 March 2001      Accepted manuscript online: 
PACS:  8280  
  6865  
  8165C  

Cite this article: 

Alfred Ludwig, Eberhard Nold, Christel Adelhelm, Shen Dian-hong SCANNING AUGER ELECTRON SPECTROSCOPIC INVESTIGATIONS OF MAGNETOSTRICTIVE NANOSCALE MULTILAYERS 2001 Chin. Phys. 10 45

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