Chin. Phys. B
中国物理B  2017, Vol. 26 Issue (6): 067701    DOI: 10.1088/1674-1056/26/6/067701
SPECIAL TOPIC --- Non-equilibrium phenomena in soft matters 最新目录| 下期目录| 过刊浏览| 高级检索 |
Influences of different oxidants on characteristics of La2O3/Al2O3 nanolaminates deposited by atomic layer deposition
Ji-Bin Fan(樊继斌), Hong-Xia Liu(刘红侠), Li Duan(段理), Yan Zhang(张研), Xiao-Chen Yu(于晓晨)
1 School of Materials Science and Engineering, Chang'an University, Xi'an 710061, China;
2 School of Microelectronics, Key Laboratory of Wide Band-Gap Semiconductor Materials and Devices, Xidian University, Xi'an 710071, China
Influences of different oxidants on characteristics of La2O3/Al2O3 nanolaminates deposited by atomic layer deposition
Ji-Bin Fan(樊继斌)1, Hong-Xia Liu(刘红侠)2, Li Duan(段理)1, Yan Zhang(张研)1, Xiao-Chen Yu(于晓晨)1
1 School of Materials Science and Engineering, Chang'an University, Xi'an 710061, China;
2 School of Microelectronics, Key Laboratory of Wide Band-Gap Semiconductor Materials and Devices, Xidian University, Xi'an 710071, China

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