Chin. Phys. B
中国物理B  2015, Vol. 24 Issue (11): 117304    DOI: 10.1088/1674-1056/24/11/117304
CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES 最新目录| 下期目录| 过刊浏览| 高级检索 |
Low specific contact resistance on epitaxial p-type 4H-SiC with a step-bunching surface
韩超a, 张玉明a, 宋庆文a b, 汤晓燕a, 张义门a, 郭辉a, 王悦湖a
a School of Microelectronics, Xidian University, Key Laboratory of Wide Band Gap Semiconductor Materials and Devices, Xi’an 710071, China;
b School of Advanced Materials and Nanotechnology, Xidian University, Xi’an 710071, China
Low specific contact resistance on epitaxial p-type 4H-SiC with a step-bunching surface
Han Chaoa, Zhang Yu-Minga, Song Qing-Wena b, Tang Xiao-Yana, Zhang Yi-Mena, Guo Huia, Wang Yue-Hua
a School of Microelectronics, Xidian University, Key Laboratory of Wide Band Gap Semiconductor Materials and Devices, Xi’an 710071, China;
b School of Advanced Materials and Nanotechnology, Xidian University, Xi’an 710071, China

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