Chin. Phys. B
  2015, Vol. 24 Issue (3): 036801    DOI: 10.1088/1674-1056/24/3/036801
CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES 最新目录| 下期目录| 过刊浏览| 高级检索 |
Strain analysis of free-standing strained silicon-on-insulator nanomembrane
孙高迪a b, 董林玺a, 薛忠营b, 陈达b, 郭庆磊b, 母志强b
a Key Laboratory of RF Circuits and System of the Ministry of Education, Hangzhou Dianzi University, Hangzhou 310018, China;
b State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
Strain analysis of free-standing strained silicon-on-insulator nanomembrane
Sun Gao-Dia b, Dong Lin-Xia, Xue Zhong-Yingb, Chen Dab, Guo Qing-Leib, Mu Zhi-Qiangb
a Key Laboratory of RF Circuits and System of the Ministry of Education, Hangzhou Dianzi University, Hangzhou 310018, China;
b State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China

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