Chin. Phys. B
  2014, Vol. 23 Issue (10): 106803    DOI: 10.1088/1674-1056/23/10/106803
CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES 最新目录| 下期目录| 过刊浏览| 高级检索 |
Influence of roughness on the detection of mechanical characteristics of low-k film by the surface acoustic waves
肖夏, 陶冶, 孙远
School of Electronic and Information Engineering, Tianjin University, Tianjin 300072, China
Influence of roughness on the detection of mechanical characteristics of low-k film by the surface acoustic waves
Xiao Xia, Tao Ye, Sun Yuan
School of Electronic and Information Engineering, Tianjin University, Tianjin 300072, China

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