Chin. Phys. B
中国物理B  2014, Vol. 23 Issue (4): 048301    DOI: 10.1088/1674-1056/23/4/048301
INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY 最新目录| 下期目录| 过刊浏览| 高级检索 |
Iron trichloride as oxidizer in acid slurry for chemical mechanical polishing of Ge2Sb2Te5
闫未霞a b, 王良咏a, 张泽芳a, 刘卫丽a, 宋志棠a
a State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;
b Graduate School of the Chinese Academy of Sciences, Beijing 100049, China
Iron trichloride as oxidizer in acid slurry for chemical mechanical polishing of Ge2Sb2Te5
Yan Wei-Xiaa b, Wang Liang-Yonga, Zhang Ze-Fanga, Liu Wei-Lia, Song Zhi-Tanga
a State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;
b Graduate School of the Chinese Academy of Sciences, Beijing 100049, China

Copyright © the Chinese Physical Society
Address:Institute of Physics, Chinese Academy of Sciences, P. O. Box 603,Beijing 100190 China(100190)
Tel: 010-82649026   Fax: 010-82649027   E-Mail: cpb@aphy.iphy.ac.cn
Supported by Beijing Magtech Co. Ltd. Tel: 86-010-62662699 E-mail: support@magtech.com.cn