Chin. Phys. B
中国物理B  2012, Vol. 21 Issue (1): 010701    DOI: 10.1088/1674-1056/21/1/010701
GENERAL 最新目录| 下期目录| 过刊浏览| 高级检索 |
Mixed polarization in determining the film thickness of a silicon sphere by spectroscopic ellipsometry
张继涛, 吴学健, 李岩
State Key Laboratory of Precision Measurement Technology & Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China
Mixed polarization in determining the film thickness of a silicon sphere by spectroscopic ellipsometry
Zhang Ji-Tao, Wu Xue-Jian, Li Yan
State Key Laboratory of Precision Measurement Technology & Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China

Copyright © the Chinese Physical Society
Address:Institute of Physics, Chinese Academy of Sciences, P. O. Box 603,Beijing 100190 China(100190)
Tel: 010-82649026   Fax: 010-82649027   E-Mail: cpb@aphy.iphy.ac.cn
Supported by Beijing Magtech Co. Ltd. Tel: 86-010-62662699 E-mail: support@magtech.com.cn