Chin. Phys. B
中国物理B  2009, Vol. 18 Issue (11): 5072    DOI: 10.1088/1674-1056/18/11/077
8000 CROSSDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY 最新目录| 下期目录| 过刊浏览| 高级检索 |
Analysis and finite element simulation of electromagnetic heating in the nitride MOCVD reactor
李志明, 郝跃, 张进成, 许晟瑞, 倪金玉, 周小伟
School of Microelectronics, Xidian University, Xi'an 710071, China;Key Laboratory of Ministry of Education for Wide Band-Gap Semiconductor Materials and Devices, Xi'an 710071, China
Analysis and finite element simulation of electromagnetic heating in the nitride MOCVD reactor
Li Zhi-Ming, Hao Yue, Zhang Jin-Cheng, Xu Sheng-Rui, Ni Jin-Yu, Zhou Xiao-Wei
School of Microelectronics, Xidian University, Xi'an 710071, China;Key Laboratory of Ministry of Education for Wide Band-Gap Semiconductor Materials and Devices, Xi'an 710071, China

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