Correlation of polishing-induced shallow subsurface damages with laser-induced gray haze damages in fused silica optics

doi:10.1088/1674-1056/25/8/088105

中国物理B ›› 2016, Vol. 25 ›› Issue (8): 88105-088105.doi: 10.1088/1674-1056/25/8/088105

• INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY • 上一篇下一篇

Correlation of polishing-induced shallow subsurface damages with laser-induced gray haze damages in fused silica optics

Xiang He(何祥), Heng Zhao(赵恒), Gang Wang(王刚), Peifan Zhou(周佩璠), Ping Ma(马平)

Chengdu Fine Optical Engineering Research Center, Chengdu 610041, China

收稿日期:2016-03-05 修回日期:2016-04-15 出版日期:2016-08-05 发布日期:2016-08-05
通讯作者: Ping Ma E-mail:map@263.net

Correlation of polishing-induced shallow subsurface damages with laser-induced gray haze damages in fused silica optics

Xiang He(何祥), Heng Zhao(赵恒), Gang Wang(王刚), Peifan Zhou(周佩璠), Ping Ma(马平)

Chengdu Fine Optical Engineering Research Center, Chengdu 610041, China

Received:2016-03-05 Revised:2016-04-15 Online:2016-08-05 Published:2016-08-05
Contact: Ping Ma E-mail:map@263.net

摘要/Abstract

摘要：

Laser-induced damage in fused silica optics greatly restricts the performances of laser facilities. Gray haze damage, which is always initiated on ceria polished optics, is one of the most important damage morphologies in fused silica optics. In this paper, the laser-induced gray haze damages of four fused silica samples polished with CeO₂, Al₂O₃, ZrO₂, and colloidal silica slurries are investigated. Four samples all present gray haze damages with much different damage densities. Then, the polishing-induced contaminant and subsurface damages in four samples are analyzed. The results reveal that the gray haze damages could be initiated on the samples without Ce contaminant and are inclined to show a tight correlation with the shallow subsurface damages.

关键词: laser-induced damage, polishing, subsurface damage, fused silica

Abstract:

Key words: laser-induced damage, polishing, subsurface damage, fused silica

中图分类号: (Pulsed laser ablation deposition)

81.15.Fg

61.80.Ba (Ultraviolet, visible, and infrared radiation effects (including laser radiation)) 81.65.Ps (Polishing, grinding, surface finishing) 42.70.Ce (Glasses, quartz)

何祥, 赵恒, 王刚, 周佩璠, 马平. Correlation of polishing-induced shallow subsurface damages with laser-induced gray haze damages in fused silica optics[J]. 中国物理B, 2016, 25(8): 88105-088105.

Xiang He(何祥), Heng Zhao(赵恒), Gang Wang(王刚), Peifan Zhou(周佩璠), Ping Ma(马平). Correlation of polishing-induced shallow subsurface damages with laser-induced gray haze damages in fused silica optics[J]. Chin. Phys. B, 2016, 25(8): 88105-088105.

参考文献 27

[1]	Huang W Q, Han W, Wang F, Xiang Y, Li F Q, Feng B, Jing F, Wei X F, Zheng W G and Zhang X M 2009 Chin. Phys. Lett. 26 017901
[2]	Stuart B C, Feit M D, Rubenchik A M, Shore B W and Perry M D 1995 Phys. Rev. Lett. 74 2248
[3]	Suratwala T, Wong L, Miller P, Feit M D, Menapace J, Steele R, Davis P, and Walmer D 2006 J. Non-Cryst. Solids 352 5601
[4]	Miller P E, Suratwala T I, Wong L L, Feit M D, Menapace J A, Davis P J and Steele R A 2005 Proc. SPIE 5991 599101
[5]	Genin F Y, Sheehan L, Yoshiyama J, Dijon J and Garrec P 1998 Proc. SPIE 3244 155
[6]	Wong J, Ferriera J L, Lindsey E F, Haupt D L, Hutcheon I D and Kinney J H 2006 J. Non-Cryst. Solids 352 255
[7]	Miller P E, Suratwala T I, Bude J D, Laurence T A, Shen N, Steele W A, Feit M D, Menapace J A and Wong L L 2009 Proc. SPIE 7504 75040X
[8]	Miller P E, Bude J D, Suratwala T I, Shen N, Laurence T A, Steele W A, Menapace J, Feit M D and Wong L L 2010 Opt. Lett. 35 2702
[9]	Bercegol H, Grua P, Hebert D and Morreeuw J P 2007 Proc. SPIE 6720 672003
[10]	Genin F Y, Campbell J, Yoshiyama J, Salleo A and Sands T 1998 Proc. SPIE 3244 348
[11]	Camp D W, Kozlowski M R, Sheehan L M, Nichols M, Dovik M, Raether R and Thomas I 1998 Proc. SPIE 3244 356
[12]	Neauport J, Lamaignere L, Bercegol H, Pilon F and Birolleau J C 2005 Opt. Express 13 10163
[13]	Sheehan L M, Kozlowski M and Camp D W 1998 Proc. SPIE 3244 282
[14]	Yoshiyama J, Genin F Y, Salleo A, Thomas I, Kozlowski M R, Sheehan L M, Hutcheon I D and Camp D W 1998 Proc. SPIE 3244 331
[15]	Kozlowski M R, Carr J, Hutcheon I, Torres R, Sheehan L, Camp D and Yan M 1998 Proc. SPIE 3244 365
[16]	Liu H J, Ye X, Zhou X D, Huang J, Wang F R, Zhou X Y, Wu W D, Jiang X D, Sui Z and Zheng W G 2014 Opt. Mater. 36 855
[17]	Suratwala T, Feit M, Steele W, Wong L, Shen N, Dylla-Spears R, Desjardin R, Mason D, Geraghty P, Miller P and Baxamusa S 2014 J. Am. Ceram. Soc. 97 81
[18]	He X, Wang G, Zhao H and Ma P 2016 Chin. Phys. B 25 048104
[19]	Tomozawa M 1997 Solid State Technol. 40 169
[20]	Evans C J, Paul E, Dornfeld D, Lucca D A, Byrne G, Tricard M, Klocke F, Dambon O and Mullany B A 2003 CIRP Ann-Manuf. Technol. 52 611
[21]	Jeng Y R and Huang P Y 2004 Electrochem. Solid State Lett. 7 G40
[22]	Liao D F, Wang J, Zhao S J, Xie R Q, Chen X H, Yuan Z G, Zhong B, Xu X and Zhang S 2014 J. Non-Cryst. Solids 391 96
[23]	Bude J, Miller P, Baxamusa S, Shen N, Laurence T, Steele W, Suratwala T, Wong L, Carr W, Cross D and Monticelli M 2014 Opt. Express 22 5839
[24]	Zhang L, Chen W and Hu L L 2013 Appl. Opt. 52 980
[25]	Feit M D and Rubenchik A M 2004 Proc. SPIE 5273 264
[26]	Zhang C L, Yuan X D, Xiang X, Wang Z G, Liu C M, Li L, He S B and Zu X T 2012 Chin. Phys. B 21 094213
[27]	Li L, Xiang X, Zu X T, Wang H J, Yuan X D, Jiang X D, Zheng W G and Dai W 2011 Chin. Phys. B 20 074209

Correlation of polishing-induced shallow subsurface damages with laser-induced gray haze damages in fused silica optics

Correlation of polishing-induced shallow subsurface damages with laser-induced gray haze damages in fused silica optics

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