Fabrication of rhenium Josephson junctions

doi:10.1088/1674-1056/22/9/097401

中国物理B ›› 2013, Vol. 22 ›› Issue (9): 97401-097401.doi: 10.1088/1674-1056/22/9/097401

• CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES • 上一篇下一篇

Fabrication of rhenium Josephson junctions

薛光明, 于海峰, 田野, 刘伟洋, 于洪伟, 任育峰, 赵士平

Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China

收稿日期:2013-03-29 修回日期:2013-05-14 出版日期:2013-07-26 发布日期:2013-07-26
基金资助:
Project supported by the National Natural Science Foundation of China (Grant Nos. 11104340 and 11104332) and the Ministry of Science and Technology of China (Grant Nos. 2009CB929102 and 2011CBA00106).

Fabrication of rhenium Josephson junctions

Xue Guang-Ming (薛光明), Yu Hai-Feng (于海峰), Tian Ye (田野), Liu Wei-Yang (刘伟洋), Yu Hong-Wei (于洪伟), Ren Yu-Feng (任育峰), Zhao Shi-Ping (赵士平)

Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China

Received:2013-03-29 Revised:2013-05-14 Online:2013-07-26 Published:2013-07-26
Contact: Zhao Shi-Ping E-mail:spzhao@iphy.ac.cn
Supported by:
Project supported by the National Natural Science Foundation of China (Grant Nos. 11104340 and 11104332) and the Ministry of Science and Technology of China (Grant Nos. 2009CB929102 and 2011CBA00106).

摘要/Abstract

摘要： Rhenium is a superconductor with a relatively weak tendency to oxidize, which is advantageous in superconducting quantum circuit and qubit applications. In this work, Re/Al-AlO_x/Re Josephson tunnel junctions were fabricated using a selective film-etching process similar to that developed in Nb trilayer technology. The Re films had a superconducting transition temperature of 4.8 K and a transition width of 0.2 K. The junctions were found to be highly reproducible using the fabrication process and their characteristics had good quality with a low leakage current and showed a superconducting gap of 0.55 meV.

关键词: Re Josephson junctions, trilayer process, qubit application

Abstract: Rhenium is a superconductor with a relatively weak tendency to oxidize, which is advantageous in superconducting quantum circuit and qubit applications. In this work, Re/Al-AlO_x/Re Josephson tunnel junctions were fabricated using a selective film-etching process similar to that developed in Nb trilayer technology. The Re films had a superconducting transition temperature of 4.8 K and a transition width of 0.2 K. The junctions were found to be highly reproducible using the fabrication process and their characteristics had good quality with a low leakage current and showed a superconducting gap of 0.55 meV.

Key words: Re Josephson junctions, trilayer process, qubit application

中图分类号: (Tunneling phenomena; Josephson effects)

74.50.+r

74.78.-w (Superconducting films and low-dimensional structures) 85.25.Cp (Josephson devices)

薛光明, 于海峰, 田野, 刘伟洋, 于洪伟, 任育峰, 赵士平. Fabrication of rhenium Josephson junctions[J]. 中国物理B, 2013, 22(9): 97401-097401.

Xue Guang-Ming (薛光明), Yu Hai-Feng (于海峰), Tian Ye (田野), Liu Wei-Yang (刘伟洋), Yu Hong-Wei (于洪伟), Ren Yu-Feng (任育峰), Zhao Shi-Ping (赵士平). Fabrication of rhenium Josephson junctions[J]. Chin. Phys. B, 2013, 22(9): 97401-097401.

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Fabrication of rhenium Josephson junctions

Fabrication of rhenium Josephson junctions

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