Theoretical study of micro-optical structure fabrication based on sample rotation and two-laser-beam interference

doi:10.1088/1674-1056/26/5/054203

中国物理B ›› 2017, Vol. 26 ›› Issue (5): 54203-054203.doi: 10.1088/1674-1056/26/5/054203

• ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS • 上一篇下一篇

Theoretical study of micro-optical structure fabrication based on sample rotation and two-laser-beam interference

Yizhen Chen(陈宜臻), Xiangxian Wang(王向贤), Ru Wang(王茹), Hua Yang(杨华), Yunping Qi(祁云平)

1 School of Science, Lanzhou University of Technology, Lanzhou 730050, China;
2 College of Physics and Electronic Engineering, Northwest Normal University, Lanzhou 730070, China

收稿日期:2016-11-07 修回日期:2016-12-16 出版日期:2017-05-05 发布日期:2017-05-05
通讯作者: Xiangxian Wang E-mail:wangxx869@126.com
基金资助:
Project supported by the National Natural Science Foundation of China (Grant No. 61505074), the National Basic Research Program of China (Grant No. 2013CBA01703), the HongLiu Young Teachers Training Program Funded Projects of Lanzhou University of Technology, China (Grant No. Q201509), and the National Undergraduate Innovation Training Program of China (Grant No. 201610731030).

Theoretical study of micro-optical structure fabrication based on sample rotation and two-laser-beam interference

Yizhen Chen(陈宜臻)¹, Xiangxian Wang(王向贤)¹, Ru Wang(王茹)¹, Hua Yang(杨华)¹, Yunping Qi(祁云平)²

1 School of Science, Lanzhou University of Technology, Lanzhou 730050, China;
2 College of Physics and Electronic Engineering, Northwest Normal University, Lanzhou 730070, China

Received:2016-11-07 Revised:2016-12-16 Online:2017-05-05 Published:2017-05-05
Contact: Xiangxian Wang E-mail:wangxx869@126.com
Supported by:
Project supported by the National Natural Science Foundation of China (Grant No. 61505074), the National Basic Research Program of China (Grant No. 2013CBA01703), the HongLiu Young Teachers Training Program Funded Projects of Lanzhou University of Technology, China (Grant No. Q201509), and the National Undergraduate Innovation Training Program of China (Grant No. 201610731030).

摘要/Abstract

摘要： A method for fabricating a micro-optical structure based on sample rotation and two-laser-beam interference is proposed. The rotation process is analyzed using the coordinate transformation in matrix presentation and the theoretical expressions of the optical field distributions corresponding to different sample rotations. By rotating the samples and changing the laser wavelength, various special micro-optical structures can be obtained, such as equally spaced concentric rings and irregular trapezoidal lattices; these structures are demonstrated by simulating the corresponding optical field distributions. The proposed approach may be developed into a low-cost laser interference lithography technology for the fabrication of various micro-optical structures.

关键词: lithography, micro-optical structure, laser interference, sample rotation

Abstract: A method for fabricating a micro-optical structure based on sample rotation and two-laser-beam interference is proposed. The rotation process is analyzed using the coordinate transformation in matrix presentation and the theoretical expressions of the optical field distributions corresponding to different sample rotations. By rotating the samples and changing the laser wavelength, various special micro-optical structures can be obtained, such as equally spaced concentric rings and irregular trapezoidal lattices; these structures are demonstrated by simulating the corresponding optical field distributions. The proposed approach may be developed into a low-cost laser interference lithography technology for the fabrication of various micro-optical structures.

Key words: lithography, micro-optical structure, laser interference, sample rotation

中图分类号: (Interference)

42.25.Hz

81.16.Nd (Micro- and nanolithography) 42.82.Cr (Fabrication techniques; lithography, pattern transfer)

陈宜臻, 王向贤, 王茹, 杨华, 祁云平. Theoretical study of micro-optical structure fabrication based on sample rotation and two-laser-beam interference[J]. 中国物理B, 2017, 26(5): 54203-054203.

Yizhen Chen(陈宜臻), Xiangxian Wang(王向贤), Ru Wang(王茹), Hua Yang(杨华), Yunping Qi(祁云平). Theoretical study of micro-optical structure fabrication based on sample rotation and two-laser-beam interference[J]. Chin. Phys. B, 2017, 26(5): 54203-054203.

参考文献 32

[1]	Moon J H, Ford J and Yang S 2006 Polym. Advan. Echnol. 17 83
[2]	Shibata S, Che Y, Sugihara O, Okamoto N and Kaino T 2004 Jpn. J. Appl. Phys. 43 2370
[3]	Yu F, Li P, Shen H, Mathur S, Lehur C M, Bakowsky U and Mücklichd F 2005 Biomaterials 26 2307
[4]	Liu Q, Duan X M and Peng C S 2014 Novel Optical Technologies for Nanofabrication (Berlin: Springer-Verlag) pp. 153-178
[5]	Heyderman L J, Solak H H, David C, Atkinson D, Cowburn R P and Nolting F 2004 Appl. Phys. Lett. 85 4989
[6]	Snow E S and Campbell P M 1994 Appl. Phys. Lett. 64 1932
[7]	Harriott L R 2001 Proc. IEEE 89 366
[8]	Hinsberg W, Houle F A, Hoffnagle J, Sanchez M, Wallraff G, Morrison M and Frank S 1998 J. Vac. Sci. Technol. 16 3689
[9]	Brousseau E B, Dimov S S and Pha D T 2010 Int. J. Adv. Manuf. Tech. 47 161
[10]	Hassanzadeh A and Ho Wong K K 2009 Photonics North 2009, August 4, 2009, Quebec, Canada, p. 73861
[11]	Xie Z H, Yu W X, Wang T S, Zhang H X, Fu Y Q, Liu H, Li F Y, Lu Z W and Sun Q 2011 Plasmonics 6 565
[12]	Sreekanth K V and Murukeshan V M 2010 J. Vac. Sci. Technol. 28 128
[13]	Yang F, Chen X, Cho E H, Lee C S, Jin P and Guo L J 2015 Appl. Phys. Express 8 062004
[14]	Wang R, Wang X X, Yang H and Ye S 2016 Acta. Phys. Sin. 65 094206 (in Chinese)
[15]	Wang X X, Zhang D G, Chen Y K, Zhu L F and Yu W H 2013 Appl. Phys. Lett. 102 031103
[16]	Wang R, Wang X X, Yang H and Qi Y P 2017 Chin. Phys. B 26 024202
[17]	Xie Q, Hong M H, Tan H L, Chen G X, Shi L P and Chong T C 2008 J. Alloys Compd. 449 261
[18]	Seo J H, Park J H, Kim S I, Park B J, Ma Z Q, Choi J and Ju B K 2014 J. Nanosci. Nanotech. 14 1521
[19]	Yang H F, He H D, Zhao E L, Han J, Hao J B, Qian J G, Tang W and Zhu H 2014 Laser Phys. 24 065901
[20]	Kim H, Jung H, Lee D H, Lee K B and Jeon H 2016 Appl. Opt. 55 354
[21]	Hang W Q, Dong T G, Wang G, Liu S L, Huang Z M, Miao X J, Lv Q and Qin C J 2015 Chin. Phys. B 24 084205
[22]	Siddique R H, Hünig R, Faisal A, Lemmer U and Hölscher H 2015 Opt. Mater. Express 5 996
[23]	Jiang H B, Zhang Y L, Han D D, Xia H, Feng J, Chen Q D, Hong Z R and Sun H B 2014 Adv. Func. Mater. 24 4595
[24]	Xuan M D, Dai L G, Jia H Q and Chen H 2014 Optoelectr. Lett. 10 51
[25]	Xu J, Wang Z B, Zhang Z, Wang D P and Weng Z K 2014 J. Appl. Phys. 115 203101
[26]	Lai N D, Liang W P, Lin J H, Hsu C C and Lin C H 2005 Opt. Express 13 9605
[27]	Voisiat B, Gedvilas M, Indrišiūnas S and Račiukaitis G 2011 Phys. Proc. 12 116
[28]	Cheng L and Lipson R H 2010 Laser Photon. Rev. 4 568
[29]	Wang X X, Wang X D, Yang H, Ye S and Yu J L 2015 J. Func. Mater. 46 20132 (in Chinese)
[30]	Hassanzadeh A, Mohammadnezhad M and Mittlerb S 2015 J. Nanophoton. 9 093067
[31]	Boas M L 2006 Mathematical Methods in the Physics Science (3nd Edn.) (Chichester: John Wiley and Sons) pp. 126-130
[32]	Born M and Wolf E 1999 Principles of Optics (7nd Edn.) (England: Cambridge University Press) pp. 287-289

Theoretical study of micro-optical structure fabrication based on sample rotation and two-laser-beam interference

Theoretical study of micro-optical structure fabrication based on sample rotation and two-laser-beam interference

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