Total ionizing dose induced single transistor latchup in 130-nm PDSOI input/output NMOSFETs

doi:10.1088/1674-1056/26/3/036103

中国物理B ›› 2017, Vol. 26 ›› Issue (3): 36103-036103.doi: 10.1088/1674-1056/26/3/036103

• CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES • 上一篇下一篇

Total ionizing dose induced single transistor latchup in 130-nm PDSOI input/output NMOSFETs

Shuang Fan(樊双), Zhi-Yuan Hu(胡志远), Zheng-Xuan Zhang(张正选), Bing-Xu Ning(宁冰旭), Da-Wei Bi(毕大炜), Li-Hua Dai(戴丽华), Meng-Ying Zhang(张梦映), Le-Qing Zhang(张乐情)

1 The State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;
2 Graduate University of the Chinese Academy of Sciences, Beijing 100049, China

收稿日期:2016-07-19 修回日期:2016-12-28 出版日期:2017-03-05 发布日期:2017-03-05
通讯作者: Zhi-Yuan Hu E-mail:zyhu@mail.sim.ac.cn
基金资助:
Project supported by Shanghai Municipal Natural Science Foundation, China (Grant No. 15ZR1447100).

Total ionizing dose induced single transistor latchup in 130-nm PDSOI input/output NMOSFETs

Shuang Fan(樊双)^1,2, Zhi-Yuan Hu(胡志远)¹, Zheng-Xuan Zhang(张正选)¹, Bing-Xu Ning(宁冰旭)¹, Da-Wei Bi(毕大炜)¹, Li-Hua Dai(戴丽华)^1,2, Meng-Ying Zhang(张梦映)^1,2, Le-Qing Zhang(张乐情)^1,2

1 The State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;
2 Graduate University of the Chinese Academy of Sciences, Beijing 100049, China

Received:2016-07-19 Revised:2016-12-28 Online:2017-03-05 Published:2017-03-05
Contact: Zhi-Yuan Hu E-mail:zyhu@mail.sim.ac.cn
Supported by:
Project supported by Shanghai Municipal Natural Science Foundation, China (Grant No. 15ZR1447100).

摘要/Abstract

摘要： Total ionizing dose induced single transistor latchup effects for 130 nm partially depleted silicon-on-insulator (PDSOI) NMOSFETs with the bodies floating were studied in this work. The latchup phenomenon strongly correlates with the bias configuration during irradiation. It is found that the high body doping concentration can make the devices less sensitive to the single transistor latchup effect, and the onset drain voltage at which latchup occurs can degrade as the total dose level rises. The mechanism of band-to-band tunneling (BBT) has been discussed. Two-dimensional simulations were conducted to evaluate the BBT effect. It is demonstrated that BBT combined with the positive trapped charge in the buried oxide (BOX) contributes a lot to the latchup effect.

关键词: total ionizing dose (TID), single transistor latchup (STL), band-to-band tunneling (BBT), partially depleted silicon-on-insulator (PDSOI)

Abstract: Total ionizing dose induced single transistor latchup effects for 130 nm partially depleted silicon-on-insulator (PDSOI) NMOSFETs with the bodies floating were studied in this work. The latchup phenomenon strongly correlates with the bias configuration during irradiation. It is found that the high body doping concentration can make the devices less sensitive to the single transistor latchup effect, and the onset drain voltage at which latchup occurs can degrade as the total dose level rises. The mechanism of band-to-band tunneling (BBT) has been discussed. Two-dimensional simulations were conducted to evaluate the BBT effect. It is demonstrated that BBT combined with the positive trapped charge in the buried oxide (BOX) contributes a lot to the latchup effect.

Key words: total ionizing dose (TID), single transistor latchup (STL), band-to-band tunneling (BBT), partially depleted silicon-on-insulator (PDSOI)

中图分类号: (Radiation effects on specific materials)

61.82.-d

85.30.De (Semiconductor-device characterization, design, and modeling) 94.20.wq (Solar radiation and cosmic ray effects)

樊双, 胡志远, 张正选, 宁冰旭, 毕大炜, 戴丽华, 张梦映, 张乐情. Total ionizing dose induced single transistor latchup in 130-nm PDSOI input/output NMOSFETs[J]. 中国物理B, 2017, 26(3): 36103-036103.

Shuang Fan(樊双), Zhi-Yuan Hu(胡志远), Zheng-Xuan Zhang(张正选), Bing-Xu Ning(宁冰旭), Da-Wei Bi(毕大炜), Li-Hua Dai(戴丽华), Meng-Ying Zhang(张梦映), Le-Qing Zhang(张乐情). Total ionizing dose induced single transistor latchup in 130-nm PDSOI input/output NMOSFETs[J]. Chin. Phys. B, 2017, 26(3): 36103-036103.

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Total ionizing dose induced single transistor latchup in 130-nm PDSOI input/output NMOSFETs

Total ionizing dose induced single transistor latchup in 130-nm PDSOI input/output NMOSFETs

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