中国物理B ›› 2014, Vol. 23 ›› Issue (8): 87802-087802.doi: 10.1088/1674-1056/23/8/087802

• SPECIAL TOPI—International Conference on Nanoscience & Technology, China 2013 • 上一篇    下一篇

Thickness dependence of the optical constants of oxidized copper thin films based on ellipsometry and transmittance

宫俊波a, 董伟乐a, 代如成b, 王中平b, 张增明b, 丁泽军a   

  1. a Department of Physics, University of Science and Technology of China, Hefei 230026, China;
    b The Center of Physical Experiments, University of Science and Technology of China, Hefei 230026, China
  • 收稿日期:2013-09-04 修回日期:2014-03-20 出版日期:2014-08-15 发布日期:2014-08-15
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant Nos. 11074232, 10874160, and 21002097) and the National Basic Research Program of China (Grant Nos. 2011CB932801 and 2012CB933702).

Thickness dependence of the optical constants of oxidized copper thin films based on ellipsometry and transmittance

Gong Jun-Bo (宫俊波)a, Dong Wei-Le (董伟乐)a, Dai Ru-Cheng (代如成)b, Wang Zhong-Ping (王中平)b, Zhang Zeng-Ming (张增明)b, Ding Ze-Jun (丁泽军)a   

  1. a Department of Physics, University of Science and Technology of China, Hefei 230026, China;
    b The Center of Physical Experiments, University of Science and Technology of China, Hefei 230026, China
  • Received:2013-09-04 Revised:2014-03-20 Online:2014-08-15 Published:2014-08-15
  • Contact: Zhang Zeng-Ming E-mail:zzm@ustc.edu.cn
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant Nos. 11074232, 10874160, and 21002097) and the National Basic Research Program of China (Grant Nos. 2011CB932801 and 2012CB933702).

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摘要： Thin oxidized copper films in various thickness values are deposited onto quartz glass substrates by electron beam evaporation. The ellipsometry parameters and transmittance in a wavelength range of 300 nm-1000 nm are collected by a spectroscopic ellipsometer and a spectrophotometer respectively. The effective thickness and optical constants, i.e., refractive index n and extinction coefficient k, are accurately determined by using newly developed ellipsometry combined with transmittance iteration method. It is found that the effective thickness determined by this method is close to the physical thickness and has obvious difference from the mass thickness for very thin film due to variable density of film. Furthermore, the thickness dependence of optical constants of thin oxidized Cu films is analyzed.

关键词: thin film, optical constants, thickness, copper

Abstract: Thin oxidized copper films in various thickness values are deposited onto quartz glass substrates by electron beam evaporation. The ellipsometry parameters and transmittance in a wavelength range of 300 nm-1000 nm are collected by a spectroscopic ellipsometer and a spectrophotometer respectively. The effective thickness and optical constants, i.e., refractive index n and extinction coefficient k, are accurately determined by using newly developed ellipsometry combined with transmittance iteration method. It is found that the effective thickness determined by this method is close to the physical thickness and has obvious difference from the mass thickness for very thin film due to variable density of film. Furthermore, the thickness dependence of optical constants of thin oxidized Cu films is analyzed.

Key words: thin film, optical constants, thickness, copper

中图分类号:  (Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity))

  • 78.20.Ci
68.47.Gh (Oxide surfaces) 68.55.jd (Thickness) 68.47.De (Metallic surfaces)