Synthesis and room-temperature NO2 gas sensing properties of a WO3 nanowires/porous silicon hybrid structure

doi:10.1088/1674-1056/23/5/058103

中国物理B ›› 2014, Vol. 23 ›› Issue (5): 58103-058103.doi: 10.1088/1674-1056/23/5/058103

• INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY • 上一篇下一篇

Synthesis and room-temperature NO₂ gas sensing properties of a WO₃ nanowires/porous silicon hybrid structure

曾鹏, 张平, 胡明, 马双云, 闫文君

School of Electronics and Information Engineering, Tianjin University, Tianjin 300072, China

收稿日期:2013-08-29 修回日期:2013-09-30 出版日期:2014-05-15 发布日期:2014-05-15
基金资助:
Project supported by the National Natural Science Foundation of China (Grant Nos. 61271070, 61274074, and 60771019) and the Key Research Program of Application Foundation and Advanced Technology of Tianjin, China (Grant No. 11JCZDJC15300).

Synthesis and room-temperature NO₂ gas sensing properties of a WO₃ nanowires/porous silicon hybrid structure

Zeng Peng (曾鹏), Zhang Ping (张平), Hu Ming (胡明), Ma Shuang-Yun (马双云), Yan Wen-Jun (闫文君)

School of Electronics and Information Engineering, Tianjin University, Tianjin 300072, China

Received:2013-08-29 Revised:2013-09-30 Online:2014-05-15 Published:2014-05-15
Contact: Hu Ming E-mail:huming@tju.edu.cn
About author:81.07.-b; 07.07.Df; 61.46.-w; 73.40.Lq
Supported by:
Project supported by the National Natural Science Foundation of China (Grant Nos. 61271070, 61274074, and 60771019) and the Key Research Program of Application Foundation and Advanced Technology of Tianjin, China (Grant No. 11JCZDJC15300).

摘要/Abstract

摘要： We report on the fabrication and performance of a room-temperature NO₂ gas sensor based on a WO₃ nanowires/porous silicon hybrid structure. The W₁₈O₄₉ nanowires are synthesized directly from a sputtered tungsten film on a porous silicon (PS) layer under heating in an argon atmosphere. After a carefully controlled annealing treatment, WO₃ nanowires are obtained on the PS layer without losing the morphology. The morphology, phase structure, and crystallinity of the nanowires are investigated by using field emission scanning electron microscopy (FESEM), X-ray diffractometer (XRD), and high-resolution transmission electron microscopy (HRTEM). Comparative gas sensing results indicate that the sensor based on the WO₃ nanowires exhibits a much higher sensitivity than that based on the PS and pure WO₃ nanowires in detecting NO₂ gas at room temperature. The mechanism of the WO₃ nanowires/PS hybrid structure in the NO₂ sensing is explained in detail.

关键词: gas sensing, WO₃ nanowires, porous silicon, hybrid structure

Abstract: We report on the fabrication and performance of a room-temperature NO₂ gas sensor based on a WO₃ nanowires/porous silicon hybrid structure. The W₁₈O₄₉ nanowires are synthesized directly from a sputtered tungsten film on a porous silicon (PS) layer under heating in an argon atmosphere. After a carefully controlled annealing treatment, WO₃ nanowires are obtained on the PS layer without losing the morphology. The morphology, phase structure, and crystallinity of the nanowires are investigated by using field emission scanning electron microscopy (FESEM), X-ray diffractometer (XRD), and high-resolution transmission electron microscopy (HRTEM). Comparative gas sensing results indicate that the sensor based on the WO₃ nanowires exhibits a much higher sensitivity than that based on the PS and pure WO₃ nanowires in detecting NO₂ gas at room temperature. The mechanism of the WO₃ nanowires/PS hybrid structure in the NO₂ sensing is explained in detail.

Key words: gas sensing, WO₃ nanowires, porous silicon, hybrid structure

中图分类号: (Nanoscale materials and structures: fabrication and characterization)

81.07.-b

07.07.Df (Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing) 61.46.-w (Structure of nanoscale materials) 73.40.Lq (Other semiconductor-to-semiconductor contacts, p-n junctions, and heterojunctions)

曾鹏, 张平, 胡明, 马双云, 闫文君. Synthesis and room-temperature NO₂ gas sensing properties of a WO₃ nanowires/porous silicon hybrid structure[J]. 中国物理B, 2014, 23(5): 58103-058103.

Zeng Peng (曾鹏), Zhang Ping (张平), Hu Ming (胡明), Ma Shuang-Yun (马双云), Yan Wen-Jun (闫文君). Synthesis and room-temperature NO₂ gas sensing properties of a WO₃ nanowires/porous silicon hybrid structure[J]. Chin. Phys. B, 2014, 23(5): 58103-058103.

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Synthesis and room-temperature NO₂ gas sensing properties of a WO₃ nanowires/porous silicon hybrid structure

Synthesis and room-temperature NO₂ gas sensing properties of a WO₃ nanowires/porous silicon hybrid structure

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