Hybrid device for acoustic noise reduction and energy harvesting based on a silicon micro-perforated panel structure

doi:10.1088/1674-1056/23/4/044302

中国物理B ›› 2014, Vol. 23 ›› Issue (4): 44302-044302.doi: 10.1088/1674-1056/23/4/044302

• ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS • 上一篇下一篇

Hybrid device for acoustic noise reduction and energy harvesting based on a silicon micro-perforated panel structure

吴少华^a, 杜利东^a, 孔德义^c, 平皓月^{a b}, 方震^a, 赵湛^a

a State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China;
b University of Chinese Academy of Sciences, Beijing 100049, China;
c State Key Laboratory of Transducer Technology, Institute of Intelligent Machines, Chinese Academy of Sciences, Hefei 230031, China

收稿日期:2013-06-11 修回日期:2013-09-05 出版日期:2014-04-15 发布日期:2014-04-15
基金资助:
Project supported by the National Natural Science Foundation of China (Grant No. 51305423) and the National Basic Research Program of China (Grant No. 2011CB302104).

Hybrid device for acoustic noise reduction and energy harvesting based on a silicon micro-perforated panel structure

Wu Shao-Hua (吴少华)^a, Du Li-Dong (杜利东)^a, Kong De-Yi (孔德义)^c, Ping Hao-Yue (平皓月)^{a b}, Fang Zhen (方震)^a, Zhao Zhan (赵湛)^a

a State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China;
b University of Chinese Academy of Sciences, Beijing 100049, China;
c State Key Laboratory of Transducer Technology, Institute of Intelligent Machines, Chinese Academy of Sciences, Hefei 230031, China

Received:2013-06-11 Revised:2013-09-05 Online:2014-04-15 Published:2014-04-15
Contact: Zhao Zhan E-mail:cpl_sci@163.com
About author:43.50.-x; 88.05.De
Supported by:
Project supported by the National Natural Science Foundation of China (Grant No. 51305423) and the National Basic Research Program of China (Grant No. 2011CB302104).

摘要/Abstract

摘要： A kind of hybrid device for acoustic noise reduction and vibration energy harvesting based on the silicon micro-perforated panel (MPP) resonant structure is investigated in the article. The critical parts of the device include MPP and energy harvesting membranes. They are all fabricated by means of silicon micro-electro-mechanical systems (MEMS) technology. The silicon MPP has dense and accurate micro-holes. This noise reduction structure has the advantages of wide band and higher absorption coefficients. The vibration energy harvesting part is formed by square piezoelectric membranes arranged in rows. ZnO material is used as it has a good compatibility with the fabrication process. The MPP, piezoelectric membranes, and metal bracket are assembled into a hybrid device with multifunctions. The device exhibits good performances of acoustic noise absorption and acoustic-electric conversion. Its maximum open circuit voltage achieves 69.41 mV.

关键词: hybrid device, noise energy harvesting, acoustic noise reduction, silicon micro-perforated panel

Abstract: A kind of hybrid device for acoustic noise reduction and vibration energy harvesting based on the silicon micro-perforated panel (MPP) resonant structure is investigated in the article. The critical parts of the device include MPP and energy harvesting membranes. They are all fabricated by means of silicon micro-electro-mechanical systems (MEMS) technology. The silicon MPP has dense and accurate micro-holes. This noise reduction structure has the advantages of wide band and higher absorption coefficients. The vibration energy harvesting part is formed by square piezoelectric membranes arranged in rows. ZnO material is used as it has a good compatibility with the fabrication process. The MPP, piezoelectric membranes, and metal bracket are assembled into a hybrid device with multifunctions. The device exhibits good performances of acoustic noise absorption and acoustic-electric conversion. Its maximum open circuit voltage achieves 69.41 mV.

Key words: hybrid device, noise energy harvesting, acoustic noise reduction, silicon micro-perforated panel

中图分类号: (Noise: its effects and control)

43.50.-x

88.05.De (Thermodynamic constraints on energy production)

吴少华, 杜利东, 孔德义, 平皓月, 方震, 赵湛. Hybrid device for acoustic noise reduction and energy harvesting based on a silicon micro-perforated panel structure[J]. 中国物理B, 2014, 23(4): 44302-044302.

Wu Shao-Hua (吴少华), Du Li-Dong (杜利东), Kong De-Yi (孔德义), Ping Hao-Yue (平皓月), Fang Zhen (方震), Zhao Zhan (赵湛). Hybrid device for acoustic noise reduction and energy harvesting based on a silicon micro-perforated panel structure[J]. Chin. Phys. B, 2014, 23(4): 44302-044302.

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Hybrid device for acoustic noise reduction and energy harvesting based on a silicon micro-perforated panel structure

Hybrid device for acoustic noise reduction and energy harvesting based on a silicon micro-perforated panel structure

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