Nitriding molybdenum： Effects of duration and fill gas pressure when using 100-Hz pulse DC discharge technique

doi:10.1088/1674-1056/23/10/105203

›› 2014, Vol. 23 ›› Issue (10): 105203-105203.doi: 10.1088/1674-1056/23/10/105203

• PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES • 上一篇下一篇

Nitriding molybdenum： Effects of duration and fill gas pressure when using 100-Hz pulse DC discharge technique

U. Ikhlaq^a, R. Ahmad^b, M. Shafiq^c, S. Saleem^a, M. S. Shah^a, T. Hussain^b, I. A. Khan^d, K. Abbas^a, M. S. Abbas^b

a Department of Physics, Government College University, Lahore 54000, Pakistan;
b Centre for Advanced Studies in Physics (CASP), Government College University, Lahore 54000, Pakistan;
c Department of Physics, Quaid-i-Azam University, Islamabad, Pakistan;
d Department of Physics, GC University Faisalabad, Faisalabad 38000, Pakistan

收稿日期:2013-11-22 修回日期:2014-06-06 出版日期:2014-10-15 发布日期:2014-10-15

Nitriding molybdenum： Effects of duration and fill gas pressure when using 100-Hz pulse DC discharge technique

U. Ikhlaq^a, R. Ahmad^b, M. Shafiq^c, S. Saleem^a, M. S. Shah^a, T. Hussain^b, I. A. Khan^d, K. Abbas^a, M. S. Abbas^b

a Department of Physics, Government College University, Lahore 54000, Pakistan;
b Centre for Advanced Studies in Physics (CASP), Government College University, Lahore 54000, Pakistan;
c Department of Physics, Quaid-i-Azam University, Islamabad, Pakistan;
d Department of Physics, GC University Faisalabad, Faisalabad 38000, Pakistan

Received:2013-11-22 Revised:2014-06-06 Online:2014-10-15 Published:2014-10-15
Contact: R. Ahmad E-mail:ahriaz@gcu.edu.pk
About author:52.80.Hc; 61.05.cp; 68.37.Hk; 68.37.Ps

摘要/Abstract

摘要： Molybdenum is nitrided by a 100-Hz pulsed DC glow discharge technique for various time durations and fill gas pressures to study the effects on the surface properties of molybdenum. X-ray diffractometry (XRD), scanning electron microscopy (SEM), and atomic force microscopy (AFM) are used for the structural and morphological analysis of the nitrided layers. Vickers' microhardness tester is utilized to investigate surface microhardness. Phase analysis shows the formation of more molybdenum nitride molecules for longer nitriding durations at fill gas pressures of 2 mbar and 3 mbar (1 bar=10⁵ Pa). A considerable increase in surface microhardness (approximately by a factor of 2) is observed for longer duration (10 h) and 2-mbar pressure. Longer duration (10 h) and 2-mbar fill gas pressure favors the formation of homogeneous, smooth, hard layers by the incorporation of more nitrogen.

关键词: pulsed DC glow discharge, scanning electron microscopy, atomic force microscopy, microhardness

Abstract: Molybdenum is nitrided by a 100-Hz pulsed DC glow discharge technique for various time durations and fill gas pressures to study the effects on the surface properties of molybdenum. X-ray diffractometry (XRD), scanning electron microscopy (SEM), and atomic force microscopy (AFM) are used for the structural and morphological analysis of the nitrided layers. Vickers' microhardness tester is utilized to investigate surface microhardness. Phase analysis shows the formation of more molybdenum nitride molecules for longer nitriding durations at fill gas pressures of 2 mbar and 3 mbar (1 bar=10⁵ Pa). A considerable increase in surface microhardness (approximately by a factor of 2) is observed for longer duration (10 h) and 2-mbar pressure. Longer duration (10 h) and 2-mbar fill gas pressure favors the formation of homogeneous, smooth, hard layers by the incorporation of more nitrogen.

Key words: pulsed DC glow discharge, scanning electron microscopy, atomic force microscopy, microhardness

中图分类号: (Glow; corona)

52.80.Hc

61.05.cp (X-ray diffraction) 68.37.Hk (Scanning electron microscopy (SEM) (including EBIC)) 68.37.Ps (Atomic force microscopy (AFM))

U. Ikhlaq, R. Ahmad, M. Shafiq, S. Saleem, M. S. Shah, T. Hussain, I. A. Khan, K. Abbas, M. S. Abbas. Nitriding molybdenum： Effects of duration and fill gas pressure when using 100-Hz pulse DC discharge technique[J]. , 2014, 23(10): 105203-105203.

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Nitriding molybdenum： Effects of duration and fill gas pressure when using 100-Hz pulse DC discharge technique

Nitriding molybdenum： Effects of duration and fill gas pressure when using 100-Hz pulse DC discharge technique

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