中国物理B ›› 2012, Vol. 21 ›› Issue (9): 97702-097702.doi: 10.1088/1674-1056/21/9/097702

• CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES • 上一篇    下一篇

Improvement of dielectric tunability and loss tangent of (Ba,Sr)TiO3 thin films with K doping

张伟杰, 戴建明, 朱雪斌, 常青, 刘强春, 孙玉平   

  1. Key Laboratory of Materials Physics, Institute of Solid State Physics, Chinese Academy of Sciences, Hefei 230031, China
  • 收稿日期:2012-02-24 修回日期:2012-03-06 出版日期:2012-08-01 发布日期:2012-08-01
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant Nos. 10874051 and 50802096) and the Innovation Project for Young Talents of Hefei Institutes of Physical Science, Chinese Academy of Sciences (Grant No. O84N391123).

Improvement of dielectric tunability and loss tangent of (Ba,Sr)TiO3 thin films with K doping

Zhang Wei-Jie (张伟杰), Dai Jian-Ming (戴建明), Zhu Xue-Bin (朱雪斌), Chang Qing (常青), Liu Qiang-Chun (刘强春), Sun Yu-Ping (孙玉平)   

  1. Key Laboratory of Materials Physics, Institute of Solid State Physics, Chinese Academy of Sciences, Hefei 230031, China
  • Received:2012-02-24 Revised:2012-03-06 Online:2012-08-01 Published:2012-08-01
  • Contact: Dai Jian-Ming E-mail:jmdai@issp.ac.cn
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant Nos. 10874051 and 50802096) and the Innovation Project for Young Talents of Hefei Institutes of Physical Science, Chinese Academy of Sciences (Grant No. O84N391123).

摘要: Ba0.6Sr0.4TiO3 thin films doped with K were deposited on Pt/Ti/SiO2/Si substrates by chemical solution deposition method. The structure, surface morphology, and dielectric and tunable properties of Ba0.6Sr0.4TiO3 thin films have been studied in detail. The K content in Ba0.6Sr0.4TiO3 thin films has a strong influence on the material's properties including surface morphology, dielectric and tunable properties. It is found that the Curie temperature of K-doped Ba0.6Sr0.4TiO3 films shifts to higher values compared with that of undoped Ba0.6Sr0.4TiO3 thin films, which leads to a dielectric enhancement of K-doped Ba0.6Sr0.4TiO3 films at room temperature. At the optimized content of 0.02 mol, the dielectric loss tangent is reduced significantly from 0.057 to 0.020. Meanwhile, the tunability is enhanced obviously from 26% to 48% at the measured frequency of 1 MHz and the maximum value of the figure of merit is 23.8. This suggests that such films have potential applications for tunable devices.

关键词: K-doped (Ba, Sr)TiO3 thin films, chemical solution deposition, dielectric properties, tunability

Abstract: Ba0.6Sr0.4TiO3 thin films doped with K were deposited on Pt/Ti/SiO2/Si substrates by chemical solution deposition method. The structure, surface morphology, and dielectric and tunable properties of Ba0.6Sr0.4TiO3 thin films have been studied in detail. The K content in Ba0.6Sr0.4TiO3 thin films has a strong influence on the material's properties including surface morphology, dielectric and tunable properties. It is found that the Curie temperature of K-doped Ba0.6Sr0.4TiO3 films shifts to higher values compared with that of undoped Ba0.6Sr0.4TiO3 thin films, which leads to a dielectric enhancement of K-doped Ba0.6Sr0.4TiO3 films at room temperature. At the optimized content of 0.02 mol, the dielectric loss tangent is reduced significantly from 0.057 to 0.020. Meanwhile, the tunability is enhanced obviously from 26% to 48% at the measured frequency of 1 MHz and the maximum value of the figure of merit is 23.8. This suggests that such films have potential applications for tunable devices.

Key words: K-doped (Ba,Sr)TiO3 thin films, chemical solution deposition, dielectric properties, tunability

中图分类号:  (Dielectric thin films)

  • 77.55.-g
77.55.fe (BaTiO3-based films) 61.05.cp (X-ray diffraction)