Irradiation effects of CO2 laser parameters on surface morphology of fused silica

doi:10.1088/1674-1056/20/4/044208

中国物理B ›› 2011, Vol. 20 ›› Issue (4): 44208-044208.doi: 10.1088/1674-1056/20/4/044208

Irradiation effects of CO₂ laser parameters on surface morphology of fused silica

祖小涛¹, 郑万国², 袁晓东², 李熙斌², 王海军², 吕海兵², 向霞³, 戴威³, 蒋勇³

(1)Department of Applied Physics, University of Electronic Science and Technology of China, Chengdu 610054, China; (2)Research Centre of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China; (3)Research Centre of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China;Department of Applied Physics, University of Electronic Science and Technology of China, Chengdu 610054, China

收稿日期:2010-08-09 修回日期:2010-09-12 出版日期:2011-04-15 发布日期:2011-04-15
基金资助:
Project supported by the National High Technology Research and Development Program of China (Grant No. 2008AA8040508) and the Foundation for Young Scholars of University of Electronic Science and Technology of China (Grant No. L08010401JX0806).

Irradiation effects of CO₂ laser parameters on surface morphology of fused silica

Xiang Xia(向霞)^a)b), Zheng Wan-Guo(郑万国)^a), Yuan Xiao-Dong(袁晓东)^a)^†, Dai Wei(戴威)^a)b), Jiang Yong(蒋勇)^a)b), Li Xi-Bin(李熙斌)^a), Wang Hai-Jun(王海军)^a), Lü Hai-Bing(吕海兵)^a), and Zu Xiao-Tao(祖小涛)^b)

^a Research Centre of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China; ^b Department of Applied Physics, University of Electronic Science and Technology of China, Chengdu 610054, China

Received:2010-08-09 Revised:2010-09-12 Online:2011-04-15 Published:2011-04-15
Supported by:
Project supported by the National High Technology Research and Development Program of China (Grant No. 2008AA8040508) and the Foundation for Young Scholars of University of Electronic Science and Technology of China (Grant No. L08010401JX0806).

摘要/Abstract

摘要： To understand the surface morphology evolution of fused silica induced by 10.6-μm CO₂ laser irradiation at different parameters, this paper reports that optical microscopy, profilometry, and hydrophilicity tests are utilized to characterize the surface structure and roughness of the laser irradiated area. The results show that three typical surface morphologies and two typical hydrophilicity test images are observed at different laser powers and pulse durations. The correlations between surface temperature and surface morphology as well as hydrophilicity behaviours are presented. The different hydrophilicity behaviours are related to surface structures of the laser-induced crater and thermal diffusion area. The thermal diffusion length monotonously increases with increasing laser power and pulse duration. The crater width is almost determined by the laser beam size. The crater depth is more sensitive to the laser power and pulse duration than the crater width.

关键词: CO₂ laser irradiation, fused silica, surface structure, hydrophilicity

Abstract: To understand the surface morphology evolution of fused silica induced by 10.6-μm CO₂ laser irradiation at different parameters, this paper reports that optical microscopy, profilometry, and hydrophilicity tests are utilized to characterize the surface structure and roughness of the laser irradiated area. The results show that three typical surface morphologies and two typical hydrophilicity test images are observed at different laser powers and pulse durations. The correlations between surface temperature and surface morphology as well as hydrophilicity behaviours are presented. The different hydrophilicity behaviours are related to surface structures of the laser-induced crater and thermal diffusion area. The thermal diffusion length monotonously increases with increasing laser power and pulse duration. The crater width is almost determined by the laser beam size. The crater depth is more sensitive to the laser power and pulse duration than the crater width.

Key words: CO₂ laser irradiation, fused silica, surface structure, hydrophilicity

中图分类号: (Glasses, quartz)

42.70.Ce

78.20.-e (Optical properties of bulk materials and thin films) 78.55.Qr (Amorphous materials; glasses and other disordered solids) 79.20.Eb (Laser ablation)

向霞, 郑万国, 袁晓东, 戴威, 蒋勇, 李熙斌, 王海军, 吕海兵, 祖小涛. Irradiation effects of CO₂ laser parameters on surface morphology of fused silica[J]. 中国物理B, 2011, 20(4): 44208-044208.

Xiang Xia(向霞), Zheng Wan-Guo(郑万国), Yuan Xiao-Dong(袁晓东), Dai Wei(戴威), Jiang Yong(蒋勇), Li Xi-Bin(李熙斌), Wang Hai-Jun(王海军), Lü Hai-Bing(吕海兵), and Zu Xiao-Tao(祖小涛) . Irradiation effects of CO₂ laser parameters on surface morphology of fused silica[J]. Chin. Phys. B, 2011, 20(4): 44208-044208.

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Irradiation effects of CO₂ laser parameters on surface morphology of fused silica

Irradiation effects of CO₂ laser parameters on surface morphology of fused silica

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