中国物理B ›› 2011, Vol. 20 ›› Issue (1): 18504-018504.doi: 10.1088/1674-1056/20/1/018504

• INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY • 上一篇    下一篇

InP-based evanescently coupled high-responsivity photodiodes with extremely low dark current density integrated diluted waveguide at 1550 nm

左玉华, 曹权, 张云, 张岭梓, 郭剑川, 薛春来, 成步文, 王启明   

  1. State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 收稿日期:2010-01-20 修回日期:2010-03-08 出版日期:2011-01-15 发布日期:2011-01-15
  • 基金资助:
    Project supported by the National High Technology Research and Development Program of China (Grant No. 2006CB302802).

InP-based evanescently coupled high-responsivity photodiodes with extremely low dark current density integrated diluted waveguide at 1550 nm

Zuo Yu-Hua(左玉华),Cao Quan(曹权),Zhang Yun(张云), Zhang Ling-Zi(张岭梓), Guo Jian-Chuan(郭剑川),Xue Chun-Lai(薛春来),Cheng Bu-Wen(成步文),and Wang Qi-Ming(王启明)   

  1. State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • Received:2010-01-20 Revised:2010-03-08 Online:2011-01-15 Published:2011-01-15
  • Supported by:
    Project supported by the National High Technology Research and Development Program of China (Grant No. 2006CB302802).

摘要: In this paper, we have demonstrated a high performance waveguide photodiode integrated diluted waveguide serving as a fibre-to-waveguide coupler to achieve high coupling efficiency. High responsivity (> 1 A/W), high saturation power (> 45 mA) in the static state and extremely low dark current density (0.04 pA/μm2) with 3 dB bandwidth at 13.4 GHz have been achieved.

Abstract: In this paper, we have demonstrated a high performance waveguide photodiode integrated diluted waveguide serving as a fibre-to-waveguide coupler to achieve high coupling efficiency. High responsivity (> 1 A/W), high saturation power (> 45 mA) in the static state and extremely low dark current density (0.04 pA/μm2) with 3 dB bandwidth at 13.4 GHz have been achieved.

Key words: high responsivity, diluted waveguide, evanescent coupling, waveguide photodiode

中图分类号:  (Photodiodes; phototransistors; photoresistors)

  • 85.60.Dw
42.81.Qb (Fiber waveguides, couplers, and arrays) 73.40.Kp (III-V semiconductor-to-semiconductor contacts, p-n junctions, and heterojunctions)